1986
DOI: 10.1063/1.337068
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Comparative electron spectroscopic studies of surface segregation on SiC(0001) and SiC(0001̄)

Abstract: Electron spectroscopic comparison of the C-rich SiC(0001̄) and Si-rich SiC(0001) surfaces after cleaning and disordering by Ar+ ion sputtering and subsequent annealing is reported. The chemical behavior of the two disordered surfaces differs significantly. Three distinct temperature regions with different carbon surface segregation kinetics are discernible on SiC(0001̄). On SiC(0001) only one temperature region for C-segregation is observed. Below 900 K, no spectroscopic differences between the two crystal sur… Show more

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Cited by 285 publications
(128 citation statements)
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“…19,20 The overall intensity of the C 1s emission increased after the 530°C annealing step, presumably due to an insufficient outgassing of the heating stage prior to the experiment. The shape of the C 1s emission after the 530°C anneal was similar to the shape of the C 1s signal observed for the CH 3 -Si(111) surface after a 530°C anneal, indicating that a similar decomposition reaction product formed at this temperature in both cases.…”
Section: Surface Symmetry Of C 2 H 5 -Functionalized Si(111)mentioning
confidence: 99%
“…19,20 The overall intensity of the C 1s emission increased after the 530°C annealing step, presumably due to an insufficient outgassing of the heating stage prior to the experiment. The shape of the C 1s emission after the 530°C anneal was similar to the shape of the C 1s signal observed for the CH 3 -Si(111) surface after a 530°C anneal, indicating that a similar decomposition reaction product formed at this temperature in both cases.…”
Section: Surface Symmetry Of C 2 H 5 -Functionalized Si(111)mentioning
confidence: 99%
“…113 The segregation of the graphite from the newly deposited film is consistent with the phase diagram.…”
Section: Section 52 Discussionsupporting
confidence: 62%
“…At about 3 eV above the C 1s peak is a broad additional feature. Others have noted the appearance of a similar feature from single crystal SiC wafers that have been subjected to high temperature anneals above 1100K and attribute the feature to graphite formation on top of the SiC [8]. We therefore suggest that the high energy feature observed in the C 1s spectrum is due to the formation of a SiCO "amalgam" following oxidation of the SiC surface.…”
Section: Discussionmentioning
confidence: 81%
“…6. The narrow high energy peak is the expected C 1s signal from bulk SiC [8]. At about 3 eV above the C 1s peak is a broad additional feature.…”
Section: Discussionmentioning
confidence: 96%