Background/Objectives: Presence of cracks in micro cantilever beams badly influence the performance of the device. This study is to propose suitable method utilizing wavelet transform to detect the cracks present over the structure of micro cantilever beams. Methods: The proposed device structure was designed and modeled using COMSOL Multi-physics simulation software. The signals obtained are analyzed using wavelet transform. Findings: Micro cantilevers shows difference in its vibrational frequency, stress and deflection over various input conditions. The location of the multiple cracks which appears in micro cantilever structure due to various working conditions were perfectly identified using wavelet transform analysis. Novelty/Applications: We report the accurate locations of the crack present in micro structured devices. This ideal method can be applied on micro cantilever devices which found its applications as Transducers, Sensors, Switches, Actuators and Probes.