Compact Silicon Waveguide Mode Converter Employing Dielectric Metasurface Structure

Wang, Hongwei; Zhang, Yong; He, Yu; Zhu, Qingming; Sun, Lu; Su, Yikai

doi:10.1002/adom.201801191

Cited by 96 publications

(48 citation statements)

References 27 publications

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“…Nanostructure based on inverse design [221] TE 0 -to-TE 3 (Theory) 1.6 × 2.4 <0. 43 NA NA Waveguide with metasurface [225] TE 0 -to-TE 2 (Experiment) 1.4 × 6.736 <1 <−10 20…”

Section: Graphene-silicon Hybrid Devicesmentioning

confidence: 99%

Silicon Photonic Platform for Passive Waveguide Devices: Materials, Fabrication, and Applications

Zhang

Qiu

et al. 2020

Adv Materials Technologies

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117

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Silicon photonics has attracted tremendous interest from academia and industry, as the fabrication of the silicon family of photonic devices is mostly compatible with the microelectronics process using complementary metal‐oxide semiconductors (CMOS). Herein, three silicon‐family materials are discussed: silicon, silicon nitride, and silica. In addition, hybrid integration with a 2D material, graphene, is examined. First, the material and waveguide properties are reviewed. Second, typical fabrication processes for waveguide devices are introduced. Subsequently, a variety of passive waveguide devices, operating at different physical dimensions covering wavelength, polarization, and mode, are discussed. They correspond to fixed and tunable filters, polarization beam splitters and rotators, and mode conversion and multiplexing devices. These passive waveguide devices play important roles in a wide range of applications including telecom, interconnects, computing, sensing, quantum information processing, bio‐photonics, and energy.

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“…Nanostructure based on inverse design [221] TE 0 -to-TE 3 (Theory) 1.6 × 2.4 <0. 43 NA NA Waveguide with metasurface [225] TE 0 -to-TE 2 (Experiment) 1.4 × 6.736 <1 <−10 20…”

Section: Graphene-silicon Hybrid Devicesmentioning

confidence: 99%

Silicon Photonic Platform for Passive Waveguide Devices: Materials, Fabrication, and Applications

Zhang

Qiu

et al. 2020

Adv Materials Technologies

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117

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“…Gradient metasurface structures consisting of phased arrays of plasmonic or dielectric nanoantennas were applied at subwavelength intervals to realize waveguide mode converters on silicon, SiN, and lithium niobate platforms ( Figure 12B) [56]. TE 0 -to-TE 1 and TE 0 -to-TE 2 mode converters were experimentally implemented using all-dielectric metasurface structures with tilted subwavelength slots ( Figure 13A) [57]. Figure 13B and C display the measured transmission spectrum of each mode in the fabricated TE 0 -to-TE 1 and TE 0 -to-TE 2 modeorder converters, respectively.…”

Section: Subwavelength Structured Mode Handling Devicesmentioning

confidence: 99%

“…Measured transmission spectra of (B) a fabricated TE 0 -to-TE 1 mode converter and (C) a fabricated TE 0to-TE 2 mode converter compared with simulation results. Reprinted from Wang et al[57]. Copyright © 2019 by John Wiley and Sons.…”

mentioning

confidence: 99%

Subwavelength structured silicon waveguides and photonic devices

Sun

Zhang

et al. 2020

Nanophotonics

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AbstractSubwavelength structures such as subwavelength gratings (SWGs) and subwavelength metamaterials are capable of tailoring the optical properties of materials and controlling the flow of light at the nanoscale. The effective indices of the subwavelength structured strip and slab waveguides can be changed in a wide range by choosing an appropriate duty cycle or a filling factor of silicon, which provides an effective method to manipulate the optical field and achieve effective index matching for functional devices. Recent advances in nanofabrication techniques have made it possible to implement subwavelength structures in silicon strip and slab waveguides. Here we review various approaches used to design subwavelength structures and achieve exotic optical responses and discuss how these structures can be used to realize high-performance silicon photonic devices. Both one-dimensional SWG devices and two-dimensional subwavelength metamaterial devices are covered in this review, including subwavelength structure–based polarization handling devices, mode manipulation devices, and building blocks for integrated optical interconnects. Perspectives on subwavelength structured silicon photonic devices are also discussed.

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“…This conversion is also called the mode-order conversion. The second category conversion has been reported with many different structures, such as the metasurface, photonic crystal and Mach-Zender interference [18]- [20]. The basic method of the conversion includes the phase matching, beam shaping and coherent scattering.…”

Section: Introductionmentioning

confidence: 99%

Broadband and High Extinction Ratio Mode Converter Using the Tapered Hybrid Plasmonic Waveguide

et al. 2019

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We propose and numerically analyze a broadband and high extinction ratio mode converter to achieve the mode conversion between the fundamental transverse electric mode (TE 0) and the first-order transverse magnetic mode (TM 1). The mode converter is achieved by using the tapered hybrid plasmonic waveguide which the metal is directly covered on the Si waveguide without a thin low-index layer. After optimizing the structure of the tapered hybrid plasmonic waveguide, a wide operation bandwidth of 100 nm is obtained with the extinction ratio of the TM 1 mode and TE 0 mode larger than 20 dB in the output Si waveguide for the forward propagation. And for the back propagation, the operation bandwidth over 65 nm is obtained with the extinction ratio larger than 20 dB in the output Si waveguide. The whole footprint of the mode converter is only 0.8 × 11 μm 2. Fabrication tolerance analysis is also demonstrated.

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Compact Silicon Waveguide Mode Converter Employing Dielectric Metasurface Structure

Cited by 96 publications

References 27 publications

Silicon Photonic Platform for Passive Waveguide Devices: Materials, Fabrication, and Applications

Silicon Photonic Platform for Passive Waveguide Devices: Materials, Fabrication, and Applications

Subwavelength structured silicon waveguides and photonic devices

Broadband and High Extinction Ratio Mode Converter Using the Tapered Hybrid Plasmonic Waveguide

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