Compact reflective imaging optics in hard X-ray region based on concave and convex mirrors

Yamada, Jumpei; Matsuyama, Satoshi; Sano, Yasuhisa; Kohmura, Yoshiki; Yabashi, Makina; Ishikawa, Tetsuya; Yamauchi, Kazuto

doi:10.1364/oe.27.003429

Cited by 17 publications

(11 citation statements)

References 33 publications

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“…Details of the detector configurations were described in Section 3.2. For the focusing, advanced Kirkpatrick-Baez mirror optics based on the Wolter type III geometry [40,41] were exploited, which were developed for the nanofocusing of X-ray free-electron laser (XFEL) pulses [28]. The mirrors had an NA of 0.01 and were designed for focusing at 9.1 keV.…”

Section: Methodsmentioning

confidence: 99%

X-Ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-Ray Nanofocusing Mirrors

Yamada

Inoue

Nakamura

et al. 2020

Sensors

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X-ray single-grating interferometry was applied to conduct accurate wavefront corrections for hard X-ray nanofocusing mirrors. Systematic errors in the interferometer, originating from a grating, a detector, and alignment errors of the components, were carefully examined. Based on the measured wavefront errors, the mirror shapes were directly corrected using a differential deposition technique. The corrected X-ray focusing mirrors with a numerical aperture of 0.01 attained two-dimensionally diffraction-limited performance. The results of the correction indicate that the uncertainty of the wavefront measurement was less than λ/72 in root-mean-square value.

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Section: Methodsmentioning

confidence: 99%

X-Ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-Ray Nanofocusing Mirrors

Yamada

Inoue

Nakamura

et al. 2020

Sensors

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“…While this is a challenge in the soft x-ray regime, multi-stage high NA Kirkpatrick-Baez (KB) mirrors have been built for hard x-rays, for example achieving a 25 nm FWHM spot size at 15 keV [26]. The x-ray beam in this case can be focused in several stages using Kirkpatrick-Baez (KB) mirrors under grazing incidence (small angle of incidence).…”

Section: X-ray Opticsmentioning

confidence: 99%

XCC: An X-ray FEL-based $γγ$ Collider Higgs Factory

Barklow¹,

Su²,

Emma³

et al. 2022

Preprint

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This report describes the design of a γγ Higgs factory in which 62.8 GeV electron beams collide with 1 keV X-ray free electron laser (XFEL) beams to produce colliding beams of 62.5 GeV photons. The Higgs boson production rate is 32,000 Higgs bosons per 10 7 second year, roughly the same as the ILC Higgs rate. The electron accelerator is based on cold copper distributed coupling (C 3 ) accelerator technology. The 0.7 J pulse energy of the XFEL represents a 300-fold increase over the pulse energy of current soft x-ray FEL's. Design challenges are discussed, along with the R&D to address them, including demonstrators.

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“…Therefore, it could not apply for the laboratory-based system. Yamada proposed combination of the Wolter III lenses could overcome the problem [6]. We have modified his idea with combining Wolter I and Wolter III lenses and realized 50 nm resolution for 15 keV X-ray with sample to camera distance less than 2 m [7].…”

Section: Introductionmentioning

confidence: 99%

Non-destructive investigation for metal structure in 3D flash memory by an ultra-high resolution x-ray microscope

Omote,

Hirose,

Tsukada

et al. 2024

Metrology, Inspection, and Process Control XXXVIII

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We have developed a high-resolution X-ray microscope with spatial resolution better than 100 nm. The utilized X-ray energy of the microscope is 17.5 keV that can penetrate through standard silicon substrate and enables to observe embedded nanoscale metal structure and defects, nondestructively. We have applied the present X-ray microscope for investigating 3D flash memory devices and observed precise metal filling structure in there. In addition, defects in the circuit area were also found.

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Compact reflective imaging optics in hard X-ray region based on concave and convex mirrors

Cited by 17 publications

References 33 publications

X-Ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-Ray Nanofocusing Mirrors

X-Ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-Ray Nanofocusing Mirrors

XCC: An X-ray FEL-based $γγ$ Collider Higgs Factory

Non-destructive investigation for metal structure in 3D flash memory by an ultra-high resolution x-ray microscope

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