Compact high-efficiency perfectly-vertical grating coupler on silicon at O-band

Wang, Siya; Hong, Yue; Zhu, Yuntao; Chen, Jingye; Gao, Shengqian; Cai, Xinlun; Shi, Yaocheng; Liu, Liu

doi:10.1364/oe.25.022032

Cited by 25 publications

(4 citation statements)

References 11 publications

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“…In recent years, significant effort has been dedicated to designing and optimizing perfectly vertical GCs. Various structures such as an asymmetric grating structure 13 , a grating on a tilted silicon membrane 17 , subwavelength metamaterials, and a dual-layer grating coupler 18 have been developed to enhance the directivity of these GCs and reduce back reflection. However, these structures require complex fabrication techniques that are not compatible with standard silicon photonics processes.…”

Section: Introductionmentioning

confidence: 99%

High-performance grating couplers on 220-nm thick silicon by inverse design for perfectly vertical coupling

Yang,

Yan,

et al. 2023

Sci Rep

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Efficient grating couplers (GCs) for perfectly vertical coupling are difficult to realize due to the second-order back reflection. In this study, apodized GCs (AGCs) are presented for achieving perfectly-vertical coupling to 220 nm thick silicon-on-insulator (SOI) waveguides in the C-band. We compare the performance of the AGCs to that of uniform GCs (UGCs) and demonstrate the superiority of the former. The AGCs were obtained through inverse design using gradient-based optimization and were found to effectively suppress back reflection and exhibit better matching to the Gaussian beam profile. The design and measurement results show that AGCs have a 3 dB lower coupling loss than UGCs. We fabricated focusing AGCs by electron beam lithography with a single, 70 nm shallow etch and a minimum feature size of 100 nm, which makes them compatible with CMOS technology. The AGCs achieved a coupling efficiency of −5.86 dB for perfectly vertical coupling. Overall, our results demonstrate the potential of AGCs for achieving high-performance coupling in the C-band on the SOI platform.

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Section: Introductionmentioning

confidence: 99%

High-performance grating couplers on 220-nm thick silicon by inverse design for perfectly vertical coupling

Yang,

Yan,

et al. 2023

Sci Rep

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“…Perfectly vertical GCs, with increased coupling efficiency, (CE) have been widely explored over the past decade. Various approaches have been proposed, including employing slanted grating [14], chirping the GC [15][16][17], relying on a tilted silicon membrane structure [18,19], adding an anti-back reflection structure [20][21][22], and employing a dual-layer grating structure [23][24][25]. However, the above reported high-efficiency approaches require either extra fabrication processes or sophisticated device structure, with a minimum feature size below 200 nm, which increases the fabrication cost drastically, and affects the fabrication error tolerance.…”

Section: Introductionmentioning

confidence: 99%

Broadband High-Efficiency Grating Couplers for Perfectly Vertical Fiber-to-Chip Coupling Enhanced by Fabry-Perot-like Cavity

et al. 2020

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We propose a broadband high-efficiency grating coupler for perfectly vertical fiber-to-chip coupling. The up-reflection is reduced, hence enhanced coupling efficiency is achieved with the help of a Fabry-Perot-like cavity composed of a silicon nitride reflector and the grating itself. With the theory of the Fabry-Perot cavity, the dimensional parameters of the coupler are investigated. With the optimized parameters, up-reflection in the C-band is reduced from 10.6% to 5%, resulting in an enhanced coupling efficiency of 80.3%, with a 1-dB bandwidth of 58 nm, which covers the entire C-band. The minimum feature size of the proposed structure is over 219 nm, which makes our design easy to fabricate through 248 nm deep-UV lithography, and lowers the fabrication cost. The proposed design has potential in efficient and fabrication-tolerant interfacing applications, between off-chip light sources and integrated chips that can be mass-produced.

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“…Polarization diversity 1D and 2D grating structures, with their relative merits and demerits 21 – 23 , were proposed to attain similar CE/CBW in both TE and TM modes 24 , 25 . Perfectly vertical GC is another area of active investigation since the recent past to realize cost-effective photonic packaging 26 – 29 .…”

Section: Introductionmentioning

confidence: 99%

A compact silicon grating coupler based on hollow tapered spot-size converter

Asaduzzaman

Bakaul

Skafidas

et al. 2018

Sci Rep

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A new compact silicon grating coupler enabling fibre-to-chip light coupling at a minimized taper length is proposed. The proposed coupler, which incorporates a hollow tapered waveguide, converts the spot-size of optical modes from micro- to nano-scales by reducing the lateral dimension from 15 µm to 300 nm at a length equals to 60 µm. The incorporation of such a coupler in photonic integrated circuit causes a physical footprint as small as 81 µm × 15 µm with coupling efficiency and 3-dB coupling bandwidth as high as 72% and 69 nm respectively.

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Compact high-efficiency perfectly-vertical grating coupler on silicon at O-band

Cited by 25 publications

References 11 publications

High-performance grating couplers on 220-nm thick silicon by inverse design for perfectly vertical coupling

High-performance grating couplers on 220-nm thick silicon by inverse design for perfectly vertical coupling

Broadband High-Efficiency Grating Couplers for Perfectly Vertical Fiber-to-Chip Coupling Enhanced by Fabry-Perot-like Cavity

A compact silicon grating coupler based on hollow tapered spot-size converter

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