Comment on “The effects of radio-frequency bias on electron density in an inductively coupled plasma reactor” [J. Appl. hys. 102, 113302 (2007)]

Abstract

Sobolewski et al. [J. Appl. Phys. 102, 113302 (2007)] obtained the complex responses of electron density to the long-pulsed RF bias and proposed the gas composition effect as a key underlying factor. In this Comment, the consistent explanations on the complex responses indicate that the ignored slow wall heating should be taken into account.