Response to “Comment on ‘The effects of radio-frequency bias on electron density in an inductively coupled plasma reactor’” [J. Appl. Phys. 132, 156101 (2022)]

Abstract

The rf-bias-induced decreases in plasma electron density observed by us [J. Appl. Phys. 102, 113302 (2007)] and others [Fox-Lyon et al., J. Vac. Sci. Technol. A 32, 030601 (2014)] are better explained by changes in gas composition, rather than neutral gas depletion.