Combustion synthesis of high-quality diamond film suitable for application in electronic devices

Okumura, Yukihiko; Kanayama, Kouichi; Tabaru, Masaya; Kawabata, Shiro

doi:10.1016/j.proci.2006.08.073

Cited by 9 publications

(4 citation statements)

References 9 publications

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“…Using different temperature combustion between the diamond (above 710℃) and the amorphous carbon (below 680℃), thermal treatment can eliminate the non-diamond phase (including amorphous graphite, carbon, and other carbon species) of diamond films [5]. Y. Okumura [6] pointed out that Raman data show the best quality of the diamond film occurs after annealing at 580 . The current study uses an annealing temperature of 600℃ to remove the non-diamond phase.…”

Section: Aftertreatmentmentioning

confidence: 99%

Morphology of the Diamond Thin Films Grown by Microwave Plasma Chemical Vapor Deposition with Different Aftertreatments

Lai

Lee

2010

AMR

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Diamond films were deposited on (111) silicon wafers by microwave plasma chemical vapor deposition (MPCVD). The deposition parameters included a system power of 1200 W, chamber pressure of 110 torr, H2 flowing rate of 300 sccm, and a CH4 flowing rate of 15 sccm. The diamond particles measured about 5-6 μm, and morphology analysis revealed a rectangular structure stacked regularly on diamond films after deposition. X-ray diffraction (XRD) analysis detected (220) square structures. Annealing at 600 °C improved the quality of diamond film, making the peak of the Raman spectra at 1350 cm-1 sharper and higher. The (220) and (311) orientation structures on the diamond films decreased after annealing broke the surface morphology. To conduct electric and optical experiments conveniently, the deposited samples were immersed in acid (HNA, HF：HNO3：CH3COOH = 3：25：10) to remove the silicon layers. The HNA acid did not corrode diamond films seriously, but slightly damaged the incomplete (220) and (311) structures.

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Section: Aftertreatmentmentioning

confidence: 99%

Morphology of the Diamond Thin Films Grown by Microwave Plasma Chemical Vapor Deposition with Different Aftertreatments

Lai

Lee

2010

AMR

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“…Carbon nanowalls (CNWs) consisting of two-dimensional (2D) graphene sheets, could be very useful for applications such as electronic devices [6] , catalyst supports [7] , super capacitor [8] and electron field emitters [9] . In addition, diamonds with nanometer dimensions, such as diamond nanoplatelets (DNPs), appearing as a nanosheet or platelet configuration with a flat wellfaceted morphology [10,11] have also attracted intensive research interests and are regarded as a new material with great potentiality in various application fields such as micro-and nano-electromechanical systems (MEMS/NEMS) [12] field emission [13,14] , biomedical [15] , electronic [16] and optoelectronic devices [17] .…”

Section: Introductionmentioning

confidence: 99%

Synthesis of Diamond Nanoplatelets/Carbon Nanowalls on Graphite Substrate by MPCVD

Zhang

Lyu

Lin

et al. 2015

Plasma Sci. Technol.

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The films composed of carbon nanowalls and diamond nanoplatelets, respectively, can be simultaneously formed on graphite substrate by controlling the hydrogen etching rate during microwave plasma chemical vapor deposition. To modulate the etching rate, two kinds of substrate design were used: a bare graphite plate and a graphite groove covered with a single crystal diamond sheet. After deposition at 1200 • C for 3 hours, we find that dense diamond nanoplatelets were grown on the bare graphite, whereas carbon nanowalls were formed on the grooved surface, indicating that not only reaction temperature but also etching behavior is a key factor for nanostructure formation.

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“…It has various advantages over other methods, such as high synthesis speed and the safety and low cost of the equipment used; these advantages are desirable in the industrial market. In the combustion flame method, the enlargement of the area of the synthesized diamond [5], the synthesis of large single-crystal diamond [6] and the synthesis of diamond films for application in electronic devices [7] have been investigated. However, to date, the factors affecting diamond synthesis remain to be determined and no means of precisely controlling this method has yet been established.…”

Section: Introductionmentioning

confidence: 99%

Step Synthesis Method for Diamond Films on Tungsten Carbide Substrate Surface by Combustion Flame

Takahashi

Kamiya

Ohyoshi

2011

Int.J.Soc.Mater.Eng.Resour.

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A combustion flame method enables the synthesis of diamond using acetylene-oxygen gas (C 2 H 2 /O 2 ) combustion flame in ambient air. Recently, tungsten carbide (WC) is used as cutting tools in the machining industry. In this study, diamond films were synthesized by combustion flame on WC surfaces. However, it was difficult to synthesize the diamond films on the WC substrate surfaces. Therefore, in order to synthesize the diamond film, a two-step synthesis method was proposed. In this method, the film surface temperature and the distance of the flame inner cone from the surface for each step are changed during the synthesis. The first step was setting the film temperature to 1273 K, the second step was setting to 1223 K. The distance of the flame inner cone from the surface was changed for each step (Case 1 ; the first step : d = 7.0 mm, the second step : d = 7.0 mm, Case 2 ; the first step : d = 7.0 mm, the second step : d = 7.5 mm, Case 3 ; the first step : d = 7.5 mm, the second step : d = 7.0 mm). In the Case 1 and 2, the delamination-free film was synthesized on the WC surfaces, and diamonds were synthesized. However, in the Case 3, the film delamination occurred, and good diamond films were not synthesized.

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Combustion synthesis of high-quality diamond film suitable for application in electronic devices

Cited by 9 publications

References 9 publications

Morphology of the Diamond Thin Films Grown by Microwave Plasma Chemical Vapor Deposition with Different Aftertreatments

Morphology of the Diamond Thin Films Grown by Microwave Plasma Chemical Vapor Deposition with Different Aftertreatments

Synthesis of Diamond Nanoplatelets/Carbon Nanowalls on Graphite Substrate by MPCVD

Step Synthesis Method for Diamond Films on Tungsten Carbide Substrate Surface by Combustion Flame

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