Combining one and two photon polymerization for accelerated high performance (3 + 1)D photonic integration

Grabulosa, Adrià; Moughames, Johnny; Porté, Xavier; Brunner, Daniel

doi:10.1515/nanoph-2021-0733

Cited by 19 publications

(17 citation statements)

References 45 publications

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“…Combining one-and two-photon polymerization is also a feasible way for photonic integration. [754] Moreover, with the recent development of cw laser polymerizable photoresists, [755][756][757] cost-effective and high-power 3D TPL printing systems may bring new possibilities for industrial mass production, and also minimization into highly integrated equipment. [758] In addition, multimaterial printing is promising as different parts of the structure can be fabricated and integrated within one step for multifunctional applications.…”

Section: Challenges and Perspectivementioning

confidence: 99%

“…Combining one‐ and two‐photon polymerization is also a feasible way for photonic integration. [ 754 ] Moreover, with the recent development of cw laser polymerizable photoresists, [ 755–757 ] cost‐effective and high‐power 3D TPL printing systems may bring new possibilities for industrial mass production, and also minimization into highly integrated equipment. [ 758 ]…”

Section: Challenges and Perspectivementioning

confidence: 99%

See 1 more Smart Citation

Two‐Photon Polymerization Lithography for Optics and Photonics: Fundamentals, Materials, Technologies, and Applications

Wang

Zhang

Ladika

et al. 2023

Adv Funct Materials

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The rapid development of additive manufacturing has fueled a revolution in various research fields and industrial applications. Among the myriad of advanced three-dimensional printing techniques, two-photon polymerization lithography (TPL) uniquely offers a significant electron microscope (SEM) images of SMP structures before and after programming and after recovery, respectively. Reproduced under terms of the CC-BY license. [114] Copyright 2021, The Authors, published by Nature Publishing Group. b) Stiff SMPs for high-resolution reversible nanophotonics. I-II) The deformed and recovered nanopillars under optical microscope and SEM, respectively. Reproduced with permission. [115] Copyright 2022, American Chemical Society. c) Vapor-responsive photonic arrays. I-IV) Optical image of a grid array in air, in water vapors ~ 20 s, saturation with water vapors ~ 88s, and after the gas flow stopped, respectively.Reproduced under terms of the CC-BY license. [116] Copyright 2021, The Authors, published by Royal Society of Chemistry. d) SEM image of a 40-layer face-cantered-cubic photonic structure printed by SU-8. Reproduced with permission. [117] Copyright 2004, Nature Publishing Group. e) SEM image of helices with an axial pitch of 800 nm and a radius of 800 nm fabricated by the two-step absorption photoresist. Reproduced with permission. [118]

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Section: Challenges and Perspectivementioning

confidence: 99%

Section: Challenges and Perspectivementioning

confidence: 99%

Two‐Photon Polymerization Lithography for Optics and Photonics: Fundamentals, Materials, Technologies, and Applications

Wang

Zhang

Ladika

et al. 2023

Adv Funct Materials

View full text Add to dashboard Cite

show abstract

“…This can be performed in two ways: 1) using two different photo resists, one for the core and one for the cladding, [107] or 2) by controlling the degree of polymerization (cross-linking), hence its n, of a single photoresist. [62,[108][109][110][111] 5. Applications…”

Section: Waveguidesmentioning

confidence: 99%

Micro‐Optics 3D Printed via Multi‐Photon Laser Lithography

Gonzalez‐Hernandez

Varapnickas

Bertoncini

et al. 2022

Advanced Optical Materials

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3D printed objects was first presented by Maruo in a technology-opening article in 1997, [2] where the use of this technology to fabricate micro-optics was also envisaged. The serial writing method of this technique offered flexibility for freeform fabrication, but was limited by its throughput. [3] It took some years for the technology to mature from proof-of-principle level to additive manufacturing as a tool for efficient and reliable fabrication in the modern lab. [4][5][6] Though the first micro-optical elements were demonstrated as early as 2006, [7] the major efforts and results only started to emerge in 2010, [8,9] together with the development of hybrid organic-inorganic materials, [10,11] and rapidly accelerated with the implementation of commercial 3D lithography systems. [12][13][14] By 2020, ultrafast laser 3D printing, also known as two-photon polymerization (TPP or 2PP), multiphoton lithography (MPL), [15][16][17] or simply laser direct writing (LDW), also in literature referenced as direct laser writing (DLW), [18] ) was already an established technique for routine fabrication of diverse micro-optical single elements, stacked components, and integrated devices. [19][20][21] The latest advances in the 3D printing of free-form micro-optics are enhanced by optical grade materials of high refractive index (n) polymers, [22] high-performance hybrids, [23] and optically active [24] or pure inorganic glasses. [25] Figure 1 shows the development of the technique in terms of published papers and citations, defining an "innovator stage" of the technology followed from 2015 by the "early adopters stage." Examples of micro-optical elements fabricated using MPL and the growth in the complexity of the structures that can be achieved by this technique are also shown in Figure 1.The advances in this scientific field attracted the attention of the related laser-assisted precision additive manufacturing industry. First, in 2007 Nanoscribe GmbH and in 2008 Workshop of Photonics established companies oriented toward commercialization of this technology aimed at general wide angle application fields. While in 2013, Multiphoton Optics GmbH and Femtika UAB were established and made micro-optics a significant part of their targeted applications. Finally, in 2017, Vanguard Photonics GmbH manufactured dedicated MPL equipment for micro-lenses and wire bond production. Other companies targeting more diverse applications have continued to emerge, such as UpNano established in 2018, and focusing mostly on biomedical applications yet also offering solutionsThe field of 3D micro-optics is rapidly expanding, and essential advances in femtosecond laser direct-write 3D multi-photon lithography (MPL, also known as two-photon or multi-photon polymerization) are being made. Micro-optics realized via MPL emerged a decade ago and the field has exploded during the last five years. Impressive findings have revealed its potential for beam shaping, advanced imaging, optical sensing, integrated photonic circuits, and much more. This is suppo...

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“…Thus, it invites to refer to as (3+1)D writing as was named in the original report. [ 19 ] Such an approach extends the 3D photonic micro‐integration to a greater flexibility, [ 21 ] however, not fully empowers the capacity of MPL to create 3D arbitrary architectures down to microscale control. On the other hand, based on it some successful efforts were put into producing cell phantoms for biological applications, [ 22 ] However, there are no reports for the exploitation directly targeting the vast potential of micro‐optics.…”

Section: Introductionmentioning

confidence: 99%

Single‐Step 3D Printing of Micro‐Optics with Adjustable Refractive Index by Ultrafast Laser Nanolithography

Gonzalez‐Hernandez

Sanchez-Padilla

Gailevičius

et al. 2023

Advanced Optical Materials

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Laser exposure defines voxel's dimensions as essential building blocks in direct write 3D nanolithography. However, the exposure conditions not only influence the size of the produced features but also their optical properties. This empowers the realization of an adjustable refractive index out of single material by varying the writing strategy while preserving laser 3D nanolithography's flexibility in geometry and high resolution. Here, the refractive index for the 450-1600 nm spectral range of the micro-optics out of SZ2080 hybrid polymer is systematically studied by applying ray and wave optics approaches followed by optical resolution analysis. It reveals the exact value of the laser-printed components instead of the determination assessed by other techniques measuring thin films or bulky volumes of the investigated substance. The studied micro-lenses are of below 100 μm in dimensions and a clear distinction in their performance on low and high exposure doses is found by analyzing it in all different approaches and validating using different lithography setups. Findings reveal the complexity of the refractive index of the 3D micro-optics which is influenced by the material density and morphology. A route for freedom in 3D printing shape and refractive index can be realized by the technological optimization of delicate exposure control in ultrafast laser nanolithography.

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Combining one and two photon polymerization for accelerated high performance (3 + 1)D photonic integration

Cited by 19 publications

References 45 publications

Two‐Photon Polymerization Lithography for Optics and Photonics: Fundamentals, Materials, Technologies, and Applications

Two‐Photon Polymerization Lithography for Optics and Photonics: Fundamentals, Materials, Technologies, and Applications

Micro‐Optics 3D Printed via Multi‐Photon Laser Lithography

Single‐Step 3D Printing of Micro‐Optics with Adjustable Refractive Index by Ultrafast Laser Nanolithography

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