Combined fluid flow simulation with electrochemical measurement for mechanism investigation of high-rate Cu pattern electroplating

Wang, Qing; Wang, Zhe; Wang, Yongtong; Tong, Yao; Chen, Mingxiang

doi:10.1016/j.jtice.2022.104528

Cited by 10 publications

(2 citation statements)

References 40 publications

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“…PEG polymers are composed of repeated ethylene oxide (C 2 H 4 O) subunits and the general molecular formula of PEG is HO(C 2 H 4 O) n H (Figure 1A) [1][2][3][4][5]. Due to their nonimmunogenic and non-antigenic properties, PEG polymers have been approved by the Food and Drug Administration (FDA) for pharmaceutical applications [6][7][8].…”

Section: Introductionmentioning

confidence: 99%

Ultra‐high‐performance liquid chromatography with tandem mass spectrometry method for cellular toxicity and pharmacokinetic study of PEG1K polymers

Ge,

Zhang,

Zheng

et al. 2024

J of Separation Science

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Polyethylene glycol (PEG) is one of the most commonly used polymers in drug delivery systems. The investigation of the pharmacokinetic behavior of PEG is important for revealing the toxicity and efficiency of PEG‐related Nano‐drug delivery systems. A high through‐put and selective ultra‐high‐performance liquid chromatography with tandem mass spectrometry (UHPLC‐MS/MS) method coupled with collision‐induced dissociation (CID) in source technique was developed and validated to determine PEG1K polymers in cellular samples in this study. The countless precursor ions of PEG1K are dissociated in the source to generate numerous product ions which have different numbers of subunits. The transition of [M+H]+ precursor ions → product ions at m/z 177.1 (four subunits)→89.1 (two subunits) was selected to determine PEG1K due to its high sensitivity. The UHPLC‐MS/MS method coupled with CID in the source showed good linearity over the range of 0.1–10 μg/mL. Intra‐day and inter‐day accuracies and precisions of the assay were all within ± 12.39%. The assay was successfully applied to a cellular pharmacokinetic study of PEG1K in human breast cancer cells. The cytotoxicity of PEG1K polymers was also studied and the results indicated that the cytotoxicity of PEG1K was not significant in the range of 5–1200 μg/mL.

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Section: Introductionmentioning

confidence: 99%

Ultra‐high‐performance liquid chromatography with tandem mass spectrometry method for cellular toxicity and pharmacokinetic study of PEG1K polymers

Ge,

Zhang,

Zheng

et al. 2024

J of Separation Science

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show abstract

“…In general, the influencing factors of electrodeposition can be categorized into three aspects, including the electric field, fluid field, and chemical field. [11][12][13][14][15] However, the case of pattern electroplating is more complicated due to the nonuniform electric field, fluid field, and chemical field and their interactions. It is worth noting that the macroscale dimension inevitably affects the profile and microstructure when the characteristic size of pattern is decreased to a level comparable to grain size.…”

Section: Introductionmentioning

confidence: 99%

Influence of Macroscale Dimension on the Electrocrystallization of Cu Pad and Redistributed Layer in Advanced Packaging

Liu,

Wan,

Gao

et al. 2024

Adv Eng Mater

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Equiaxed copper (EG Cu), copper with columnar nanotwinned grains (C‐NT Cu), and copper with mixed equiaxed and columnar grains (MG Cu) were electroplated on pads and redistributed layers (RDLs) with different dimensions. When the diameters of pads increased from 40 μm to 105 μm, the flatness of pads decreased from 34.5% to 24.0%. And the flatness gradually deteriorated from 16.5 % to 34.4 % with the increase of RDL width from 8 μm to 20 μm. In contrast, the flatness of C‐NT Cu and MG Cu fluctuated between 1 % and 5 %, showing a weak correlation on the dimension. In terms of microstructure, the EG Cu and MG Cu had a weak correlation with size change, and the grain orientation showed a randomness. However, the (111) texture component of C‐NT Cu differed greatly with different dimensions, especially in transition layer. The (111) texture component changed from 9.6% to 38.1% for ϕ 40‐105 μm pad, and from 14.3% to 18.9% for 8‐20 μm wide RDL. The study reveals the significant size effect on the deposited profile and microstructure of electrodeposited copper materials, which should give insights of the materials design in advanced packaging technology.This article is protected by copyright. All rights reserved.

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Fabrication of Cu2-xO thin films directly bondable to copper on aluminum nitride substrates using the sol-gel method

Wan,

Lee,

Hsiang

2024

Ceramics International

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Combined fluid flow simulation with electrochemical measurement for mechanism investigation of high-rate Cu pattern electroplating

Cited by 10 publications

References 40 publications

Ultra‐high‐performance liquid chromatography with tandem mass spectrometry method for cellular toxicity and pharmacokinetic study of PEG1K polymers

Ultra‐high‐performance liquid chromatography with tandem mass spectrometry method for cellular toxicity and pharmacokinetic study of PEG1K polymers

Influence of Macroscale Dimension on the Electrocrystallization of Cu Pad and Redistributed Layer in Advanced Packaging

Fabrication of Cu2-xO thin films directly bondable to copper on aluminum nitride substrates using the sol-gel method

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