Coherent x-ray wavefront reconstruction of a partially illuminated Fresnel zone plate

Mastropietro, Francesca; Carbone, Dina; Díaz, Ana; Eymery, J.; Sentenac, Anne; Metzger, T. H.; Chamard, Virginie; Favre‐Nicolin, V.

doi:10.1364/oe.19.019223

Cited by 35 publications

(39 citation statements)

References 34 publications

(38 reference statements)

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“…In the horizontal direction, the retrieved spot is asymmetric and its width matches our expectations from the experimental data analysis, which anticipated an horizontally extended beam spot. Th ese two characteristics, horizontal asymmetry and broadening, are typical eff ects observed when the central stop partly occludes the rectangular aperture at the FZP 21 . It results from a non-intentional horizontal off set of the FZP aperture position.…”

Section: Resultsmentioning

confidence: 99%

“…To this aim, we have designed an extended crystalline nanostructure from a silicon-on-insulator substrate. Th e fi nite-sized coherent beam spot required for the measurement was produced by the coherent illumination of a Fresnel zone plate (FZP) 21 . Th e 3D Bragg diff raction intensity was measured in the vicinity of the chosen Bragg refl ection, as a function of the beam position on the sample.…”

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confidence: 99%

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Three-dimensional high-resolution quantitative microscopy of extended crystals

et al. 2011

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Hard X-ray lens-less microscopy raises hopes for a non-invasive quantitative imaging, capable of achieving the extreme resolving power demands of nanoscience. However, a limit imposed by the partial coherence of third generation synchrotron sources restricts the sample size to the micrometer range. Recently, X-ray ptychography has been demonstrated as a solution for arbitrarily extending the fi eld of view without degrading the resolution. Here we show that ptychography, applied in the Bragg geometry, opens new perspectives for crystalline imaging. The spatial dependence of the three-dimensional Bragg peak intensity is mapped and the entire data subsequently inverted with a Bragg-adapted phase retrieval ptychographical algorithm. We report on the image obtained from an extended crystalline sample, nanostructured from a silicon-on-insulator substrate. The possibility to retrieve, without transverse size restriction, the highly resolved three-dimensional density and displacement fi eld will allow for the unprecedented investigation of a wide variety of crystalline materials, ranging from life science to microelectronics.

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Section: Resultsmentioning

confidence: 99%

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confidence: 99%

Three-dimensional high-resolution quantitative microscopy of extended crystals

et al. 2011

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“…The distribution of intensity is similar to the report by Ying et al 13 and to other previous reports. 15,16 The relationship between the incident and scattered beams was determined by summing the amplitude of radiation scattered by each plane of atoms in the sample. Absorption and multiple scattering were neglected.…”

Section: Coherent Diffraction Simulation and Analysis Methodsmentioning

confidence: 99%

“…The diffraction problem can be considered using the general framework of coherent diffraction imaging techniques. [12][13][14] Computational methods are used to retrieve the illumination function 15,16 and to form the images of projections of the strain along specific crystallographic directions or dislocation strain fields. 17,18 Intricate semiconductor heterostructures face challenges associated with the reciprocal-space a)…”

Section: Introductionmentioning

confidence: 99%

Combining experiment and optical simulation in coherent X-ray nanobeam characterization of Si/SiGe semiconductor heterostructures

Tilka

Park

Ahn

et al. 2016

Journal of Applied Physics

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The highly coherent and tightly focused x-ray beams produced by hard x-ray light sources enable the nanoscale characterization of the structure of electronic materials but are accompanied by significant challenges in the interpretation of diffraction and scattering patterns. X-ray nanobeams exhibit optical coherence combined with a large angular divergence introduced by the x-ray focusing optics. The scattering of nanofocused x-ray beams from intricate semiconductor heterostructures produces a complex distribution of scattered intensity. We report here an extension of coherent x-ray optical simulations of convergent x-ray beam diffraction patterns to arbitrary x-ray incident angles to allow the nanobeam diffraction patterns of complex heterostructures to be simulated faithfully. These methods are used to extract the misorientation of lattice planes and the strain of individual layers from synchrotron x-ray nanobeam diffraction patterns of Si/SiGe heterostructures relevant to applications in quantum electronic devices. The systematic interpretation of nanobeam diffraction patterns from semiconductor heterostructures presents a new opportunity in characterizing and ultimately designing electronic materials.

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“…Unless a reduced portion of the FZP is taken as input for twodimensional calculation (Mastropietro et al, 2011) or large computing facilities are used, the simulations must be restricted to a one-dimensional profile to avoid incurring currently unfeasible computer memory requirements. In the past, computer simulations for the propagated optical wavefield produced by diffractive X-ray optics have been implemented by numerically solving the parabolic wave equation (Kopylov et al, 1995;Kurokhtin & Popov, 2002).…”

Section: Methodsmentioning

confidence: 99%

Angular spectrum simulation of X-ray focusing by Fresnel zone plates

Vila‐Comamala

Wojcik

Díaz

et al. 2013

J Synchrotron Radiat

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A computing simulation routine to model any type of circularly symmetric diffractive X-ray element has been implemented. The wavefield transmitted beyond the diffractive structures is numerically computed by the angular spectrum propagation method to an arbitrary propagation distance. Cylindrical symmetry is exploited to reduce the computation and memory requirements while preserving the accuracy of the numerical calculation through a quasidiscrete Hankel transform algorithm, an approach described by Guizar-Sicairos & Gutierrez-Vega [J. Opt. Soc. Am. A, (2004), 21, 53-58]. In particular, the code has been used to investigate the requirements for the stacking of two highresolution Fresnel zone plates with an outermost zone width of 20 nm.

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Coherent x-ray wavefront reconstruction of a partially illuminated Fresnel zone plate

Cited by 35 publications

References 34 publications

Three-dimensional high-resolution quantitative microscopy of extended crystals

Three-dimensional high-resolution quantitative microscopy of extended crystals

Combining experiment and optical simulation in coherent X-ray nanobeam characterization of Si/SiGe semiconductor heterostructures

Angular spectrum simulation of X-ray focusing by Fresnel zone plates

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