Femtosecond laser-induced periodic structures (LIPSS) have been processed on ZnO thin film gas sensor devices for nitrogen dioxide (NOi) detection. From the morphology point of view, the nanostructures have been iden tified as high spatial frequency UPSS (HSFL) with an average period of 145 nm. Through Raman analysis, a decrease of the typical wurtzite ZnO structure is shown, with a possible increase of defects such as Zn inter sti tials. The response under N(½ is enhanced if compared with the only-annealed ZnO thin film for conoentra tions as low as 1 ppm, reaching 1 ppb of detection lirnit (WD) for the sensors with LIPSS. The Zn interstitials defects could be the source of the adsorbed N(½ species increasing the sensitivity. Reproducible results have been measured during 11 weeks in a row.