Fabrication of large-scale ripples on fluorine-doped tin oxide films by femtosecond laser irradiation

Abstract

The large-scale uniform self-organized ripples are fabricated on fluorine-doped tin oxide (FTO) coated glass by femtosecond laser. They can be smoothly linked in a horizontal line with the moving of XY Z stage by setting its velocity and the repetition rate of the laser. The ripple-to-ripple linking can also be realized through line-by-line scanning on a vertical level. The mechanism analysis shows that the seeding effect plays a key role in the linking of ripples.

Etching-assisted femtosecond laser microfabrication

“…With the increase of the demands in the manufacturing of various micro-nano devices, femtosecond laser directwriting (FsLDW) has attracted significant interest owing to its ability for high-performance three-dimensional (3D) fabrication. [1][2][3][4][5][6][7][8][9][10][11][12][13][14] The non-linear nature of the FsLDW can satisfy the stringent requirements in terms of both high fabrication precision and flexible designability, making it well applicable in optics, [15][16][17] photochemistry, [18] optoelectronics, [19] nanophotonics, [20] etc. The ultra-high energy of the femtosecond laser pulse enables fine processing of materials through two-photon polymerization or laser ablation.…”