This paper begins with a discussion of the role and value of industrial control system (ICS) testbed which apply a universal, controllable, realistic, and repeatable experimental platform to SCADA control system cybersecurity research. According to ICS layered architecture, ICS testbed based on emulation, physical, and simulation (EPS-ICS Testbed) is designed and implemented. EPS-ICS Testbed enables experimenters to create experiments with varying levels of fidelity and is widely used in vulnerability digging, comprehensive security training, facilitate development of security standards, develop advanced control system architectures and technologies that are more secure and robust.