CMOS-MEMS Resonators and Oscillators : A Review

doi:10.18494/sam.2018.1857

Cited by 10 publications

(3 citation statements)

References 21 publications

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“…In parallel, ultra-low cost light-emitting diodes (LEDs) are now available that provide enough power to excite fluorescent material for optical imaging [19,20]. Similarly, with the rapid development of optics and manufacturing, high performance image sensors such as complementary metal oxide semiconductor (CMOS) image sensors and optical components such as lenses and spectral filters are available at a low cost [21]. Several compact image sensors have thus become available [22,23].…”

Section: Introductionmentioning

confidence: 99%

A Cost-Effective Nucleic Acid Detection System Using a Portable Microscopic Device

Wei

et al. 2022

Micromachines

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A fluorescence microscope is one of the most important tools for biomedical research and laboratory diagnosis. However, its high cost and bulky size hinder the application of laboratory microscopes in space-limited and low-resource applications. Here, in this work, we proposed a portable and cost-effective fluorescence microscope. Assembled from a set of 3D print components and a webcam, it consists of a three-degree-of-freedom sliding platform and a microscopic imaging system. The microscope is capable of bright-field and fluorescence imaging with micron-level resolution. The resolution and field of view of the microscope were evaluated. Compared with a laboratory-grade inverted fluorescence microscope, the portable microscope shows satisfactory performance, both in the bright-field and fluorescence mode. From the configurations of local resources, the microscope costs around USD 100 to assemble. To demonstrate the capability of the portable fluorescence microscope, we proposed a quantitative polymerase chain reaction experiment for meat product authenticating applications. The portable and low-cost microscope platform demonstrates the benefits in space-constrained environments and shows high potential in telemedicine, point-of-care testing, and more.

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Section: Introductionmentioning

confidence: 99%

A Cost-Effective Nucleic Acid Detection System Using a Portable Microscopic Device

Wei

et al. 2022

Micromachines

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“…The advances in computing and wireless communication allow for smart portable devices capable of predicting our needs based on the environment and past data (Jie et al, 2013). Complementary metal-oxide semiconductor (CMOS) technology is widely researched for the fabrication of MEMS like accelerometers (Tsai et al, 2012), resonators (Chen et al, 2018), mass sensors (Vidal-Álvarez et al, 2016), thermal sensors (Göktaş, 2019), pressure sensors (Liao et al, 2021), ultrasonic transducers (Hsu et al, 2020), microfluidic devices (Huang and Mason, 2013), and biosensors (Lu and Bhushan, 2016). Compact size, long battery life, high performance, and ease of bulk manufacturing for low ownership cost and rapid deployment are prerequisites for smart sensors.…”

Section: Introductionmentioning

confidence: 99%

CMOS-MEMS Thermal-Piezoresistive Resonators and Oscillators for Sensors

Zope

Li²

2022

Front. Mech. Eng.

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Microelectromechanical systems (MEMS) are in widespread commercial use due to their compact size, high performance, and low cost. MEMS resonators have emerged as front runners for sensing (accelerometers, gyroscopes, and particulate matter) and frequency (RF front-end, filters, timing, and frequency source) applications. The excellent stability, resolution, and accuracy of resonators lead them an ideal candidate for sensor implementation. The CMOS-MEMS technology allows for rapid, large-scale, and low-cost manufacturing. Thermal–piezoresistive resonators (TPRs) are promising candidates due to their favorable potential with scaling and robust performance in the ambient environment. A detailed finite element method (FEM) simulation flow is presented along with a mathematical model for device optimization. The devices were fabricated with the commercial CMOS technology utilizing the front-end-of-line (FEOL) polysilicon and back-end-of-line (BEOL) materials like silicon dioxide and interconnect metal. The flexibility of selective material placement in layout and complex routing using multi-metal interconnect is employed to develop a balanced TPR design at 2 MHz. A 5-MHz bulk mode TPR was designed for mass sensing application. The fabricated devices were characterized, and their performance is compared with other state-of-the-art works. Finally, the developed devices were used in real-world applications for mass sensing and pressure sensing. The device achieved 20 kHz/ng. The TPR devices combine principles of Pirani gauge and resonant sensors for improving the sensing range from 2 to 760 Torr (1 atm).

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“…Microresonators are one of the most frequently used MEMS devices, for applications in frequency filtering, timing, inertial sensing, mass and chemical sensing applications [2,19]. Microresonators are commonly fabricated on silicon substrates but in the last decades glass and polymer substrates have received increasingly attention [4,7,[20][21][22][23][24][25][26][27].…”

Section: Introductionmentioning

confidence: 99%

Fabrication and characterization of thin-film silicon resonators on 10 $\boldsymbol{{\mu}}$m-thick polyimide substrates

Pestana¹,

Pinto²,

Dias³

et al. 2020

J. Micromech. Microeng.

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MEMS fabricated on polymer substrates can allow for a range of new applications that require bending or lightweight, unbreakable substrates. The surface micromachining of hydrogenated amorphous silicon resonators on 10 µm-thick flexible polyimide substrates is presented. Clamped-clamped (bridges) and clamped-free (cantilevers) resonators are fabricated and characterized, exhibiting quality factors as high as 2.0 × 103 and natural resonance frequencies in the 104–106 Hz range. The deflection of an 80 µm long bridge was measured to be over 100 pm, using laser Doppler vibrometry. The electrical addressing of the devices was demonstrated to be reliable when bent to radii of curvature larger than 10 mm. The resonators on ultra-thin polymer are characterized using different actuation voltages and pressures, showing comparable performance to resonators on rigid (glass) substrates. However, the flexible substrate allows the relaxation of the residual stress of the structural film in clamped-clamped structures, lowering the resonance frequency. Resonators on PI were found to be suitable for mass-sensing applications, achieving a minimum frequency shift detectable Δfmin = 30 Hz which results in a calculated mass sensitivity of 25 pg in vacuum. Ultimately, the reliable performance of the resonators developed in this work make them good candidates for applications that require mass-sensing on ultra-thin, flexible substrates.

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CMOS-MEMS Resonators and Oscillators : A Review

Cited by 10 publications

References 21 publications

A Cost-Effective Nucleic Acid Detection System Using a Portable Microscopic Device

A Cost-Effective Nucleic Acid Detection System Using a Portable Microscopic Device

CMOS-MEMS Thermal-Piezoresistive Resonators and Oscillators for Sensors

Fabrication and characterization of thin-film silicon resonators on 10 $\boldsymbol{{\mu}}$m-thick polyimide substrates

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