Sensors: Focus on Tactile Force and Stress Sensors 2008
DOI: 10.5772/6615
|View full text |Cite
|
Sign up to set email alerts
|

CMOS Force Sensor with Scanning Signal Process Circuit for Vertical Probe Card

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1

Citation Types

0
3
0

Year Published

2016
2016
2021
2021

Publication Types

Select...
2
1

Relationship

0
3

Authors

Journals

citations
Cited by 3 publications
(3 citation statements)
references
References 10 publications
0
3
0
Order By: Relevance
“…The pressure sensor used is the type MPX5050GP are easily available in the market and this type is gauge (not depends on the atmospheric pressure) [15]. This membrane deformation will change the resistivity of piezore-sistor which affects the piezoresistors resistance and output voltage of sensor [16]. This pressure sensor is a monolithic silicon pressure sensor designed for a wide range of applications, especially those using a microcontroller or microprocessor with A/D input [17].…”
Section: ) Materials and Toolmentioning
confidence: 99%
“…The pressure sensor used is the type MPX5050GP are easily available in the market and this type is gauge (not depends on the atmospheric pressure) [15]. This membrane deformation will change the resistivity of piezore-sistor which affects the piezoresistors resistance and output voltage of sensor [16]. This pressure sensor is a monolithic silicon pressure sensor designed for a wide range of applications, especially those using a microcontroller or microprocessor with A/D input [17].…”
Section: ) Materials and Toolmentioning
confidence: 99%
“…The sensor has a built in miniature Wheatstone bridge and square membrane with 4 piezoresistors (2 transverse and 2 longitudinal). The square membrane will be deformed when pressurized [10].…”
Section: Hardware Designmentioning
confidence: 99%
“…The membrane will deform when subjected to pressure. This membrane deformation will change the resistivity of piezoresistor which affects the piezoresistors resistance and output voltage of sensor [10]. The pressure sensor used is the type MPX5050GP are easily available in the market and this type is gauge (not depends on the atmospheric pressure).…”
Section: Introductionmentioning
confidence: 99%