CMOS-compatible process for fibre alignment grooves in silicon

Chaffey, Jason; Austin, Michael W.; Switala, Igor; Grant, Kevin

doi:10.1109/commad.2002.1237317

2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)

DOI: 10.1109/commad.2002.1237317

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CMOS-compatible process for fibre alignment grooves in silicon

Jason Chaffey

Michael W. Austin

Igor Switala³

et al.

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CMOS-compatible process for fibre alignment grooves in silicon

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References 7 publications

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