2014
DOI: 10.1364/oe.22.002489
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CMOS-compatible highly efficient polarization splitter and rotator based on a double-etched directional coupler

Abstract: We present a highly efficient polarization splitter and rotator (PSR), fabricated using 248 nm deep ultraviolet lithography on a silicon-on-insulator substrate. The PSR is based on a double-etched directional coupler with a length of 27 µm. The fabricated PSR yields a TM-to-TE conversion loss better than 0.5 dB and TE insertion loss better than 0.3 dB, with an ultra-low crosstalk (-20 dB) in the wavelength regime 1540-1570 nm.

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Cited by 78 publications
(32 citation statements)
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“…Integration with silicon photonic elements: Another promising direction is integrating plasmonic devices with silicon photonics. Silicon photonic devices that share the commercial complementary metal-oxide semiconductor (CMOS) chip fabrication facilities have witnessed fast development in recent years [140][141][142][143] and will be very likely commercialized in the near future. The silicon photonic devices do not suffer much from absorption losses; however, it is limited by their sizes due to the diffraction limit.…”
Section: Perspectivesmentioning
confidence: 99%
“…Integration with silicon photonic elements: Another promising direction is integrating plasmonic devices with silicon photonics. Silicon photonic devices that share the commercial complementary metal-oxide semiconductor (CMOS) chip fabrication facilities have witnessed fast development in recent years [140][141][142][143] and will be very likely commercialized in the near future. The silicon photonic devices do not suffer much from absorption losses; however, it is limited by their sizes due to the diffraction limit.…”
Section: Perspectivesmentioning
confidence: 99%
“…High refractive index contrast makes silicon waveguides highly polarization dependent. To address this issue, various types of passive polarization management components have been reported recently, including polarization splitters [2,3], rotators [4][5][6][7][8][9][10] and polarizers [11][12][13][14][15][16]. Among them, polarizers which simply filter the undesired polarization state are suitable for many applications.…”
Section: Introductionmentioning
confidence: 99%
“…Particularly in recent years, the booming silicon photonic transmitters and receivers for 100 Gb/s coherent optical communication requires a robust polarization diversity scheme which should have a large fabrication tolerance and ensure a high manufacture yield because of the high cost of this complex silicon photonic module [13][14][15][16]. Various structures have been reported based on asymmetric directional couplers (DCs) [17][18][19][20][21][22] and Y-junctions [23] so far. However, most of these previously reported DC-based PSRs require strict phase matching conditions and thus the performances are usually sensitive to the size deviation due to the imperfect fabrication process [17][18][19][20][21][22].…”
Section: Introductionmentioning
confidence: 99%
“…Various structures have been reported based on asymmetric directional couplers (DCs) [17][18][19][20][21][22] and Y-junctions [23] so far. However, most of these previously reported DC-based PSRs require strict phase matching conditions and thus the performances are usually sensitive to the size deviation due to the imperfect fabrication process [17][18][19][20][21][22]. The PSR based on mode-evolution Y-junctions has a considerably large bandwidth, but a low-loss asymmetric Y-junction is difficult to achieve in practice [23].…”
Section: Introductionmentioning
confidence: 99%