2007
DOI: 10.1109/lpt.2006.890109
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CMOS-Compatible All-Si High-Speed Waveguide Photodiodes With High Responsivity in Near-Infrared Communication Band

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Cited by 154 publications
(99 citation statements)
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“…Devices which utilize defect mediated absorption have been established for some time as a viable method for the development of monolithic waveguide photodetectors suitable for use in the C and L bands (for example see [16,23,24]). The introduction of defect states within the bandgap permit the absorption of sub-bandgap photons through a mechanism of optical absorption and thermal excitation from the defect state [16].…”
Section: Photodetectionmentioning
confidence: 99%
“…Devices which utilize defect mediated absorption have been established for some time as a viable method for the development of monolithic waveguide photodetectors suitable for use in the C and L bands (for example see [16,23,24]). The introduction of defect states within the bandgap permit the absorption of sub-bandgap photons through a mechanism of optical absorption and thermal excitation from the defect state [16].…”
Section: Photodetectionmentioning
confidence: 99%
“…Other all-silicon detectors, based on SSA [19,21] or defect mediated absorption [9,22,23], require the photogenerated carriers to be swept away from the waveguide through highly doped regions or electric lines directly contacted to the Si core, thus resulting in additional optical loss. In contrast, the capacitively coupled electrodes of the CLIPP perform a remote monitoring of the optical field, thus avoiding any perturbation [16].…”
Section: Clipp Concept and Fabricationmentioning
confidence: 99%
“…Germanium is easier to integrate, since it is a CMOS compatible material, but the growth of high quality germanium is a non-standard process usually requiring specialized equipment. Another technique that has been used to successfully produce silicon photodectors is the creation of mid-bandgap states directly in the silicon [26]. With the correct implant and anneal, crystal defects can be created to absorb this radiation and generate a photocurrent [27].…”
Section: All Silicon Photodiodementioning
confidence: 99%