2008
DOI: 10.1007/s11664-008-0493-5
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Cleaved Mirrors for Nitride Semiconductor Lasers

Abstract: We demonstrate smooth cleaved gallium nitride facet mirrors on Si(111) substrates fabricated by a microcleaving technology. Cantilever features were defined by photolithography, followed by a vertical photo-enhanced electrochemical (PEC) etch until the substrate was exposed. Lateral undercuts underneath the cantilevers were created by a silicon isotropic wet etch, and the nitride cantilevers were isolated from the substrate completely. Mechanical forces were applied to break the cantilevers. The facets made by… Show more

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Cited by 3 publications
(3 citation statements)
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References 13 publications
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“…It is noted that wrinkle-like features in the cleaved facet mentioned in Ref. [30] are greatly reduced here.…”
mentioning
confidence: 52%
“…It is noted that wrinkle-like features in the cleaved facet mentioned in Ref. [30] are greatly reduced here.…”
mentioning
confidence: 52%
“…Each stripe was aligned parallel to the [11̅00] direction as mentioned above. This configuration made it possible to use the m -plane most favorable to cleaving in crystal GaN as a facet. This was also favorable for obtaining a short cavity because the distance for complete separation was much shorter than that of a typical continuous film wafer. We applied the inherent stress in the stripes due to the difference in the thermal expansion coefficient between Si and GaN so that only the stripe portion was cleaved, while the Si substrate remained intact.…”
Section: Resultsmentioning
confidence: 99%
“…8 Some commonly used methods to cleave GaN/AlN-on-sapphire include microcleaving, laser scribing with manual breakage, and combined plasma-and-wet etching of facets. [9][10][11] For example, in microcleaving technology, multiple process steps are required to define cantilever features using lithography, followed by multiple wet etch steps to get a cleaved facet. In laser scribing, the substrate is thinned down and scribed using a high power laser on the substrate side followed by manual breakage.…”
Section: Introductionmentioning
confidence: 99%