2008
DOI: 10.1088/1742-6596/100/6/062025
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Cleaning efficiency of carbon films by oxygen plasmas in the presence of metallic getters

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Cited by 2 publications
(3 citation statements)
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“…There are two aspects of the ITER facing components of particular concern: the extensive coverage of the first wall by Be and the presence of narrow gaps [38]. Experiments specifically oriented to these issues were performed at CIEMAT, and described in previous works [19,21,39,40]. In summary, He/O 2 mixtures (at several ratios) and H 2 /N 2 mixtures (20 : 80) were used in a dc GD plasma in order to remove pure and doped [Mg, Li, B] a-C : H films [39].…”
Section: Removal By O 2 N 2 Nh 3 and No 2 Plasmasmentioning
confidence: 99%
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“…There are two aspects of the ITER facing components of particular concern: the extensive coverage of the first wall by Be and the presence of narrow gaps [38]. Experiments specifically oriented to these issues were performed at CIEMAT, and described in previous works [19,21,39,40]. In summary, He/O 2 mixtures (at several ratios) and H 2 /N 2 mixtures (20 : 80) were used in a dc GD plasma in order to remove pure and doped [Mg, Li, B] a-C : H films [39].…”
Section: Removal By O 2 N 2 Nh 3 and No 2 Plasmasmentioning
confidence: 99%
“…Experiments specifically oriented to these issues were performed at CIEMAT, and described in previous works [19,21,39,40]. In summary, He/O 2 mixtures (at several ratios) and H 2 /N 2 mixtures (20 : 80) were used in a dc GD plasma in order to remove pure and doped [Mg, Li, B] a-C : H films [39]. The films were either fully exposed to the plasmas or lying on the sides of a gap (0.2-1 mm wide ×25 mm deep).…”
Section: Removal By O 2 N 2 Nh 3 and No 2 Plasmasmentioning
confidence: 99%
“…It has been repeatedly considered as a possible tracer for molecular oxygen [9][10][11] in a similar way as N 2 H + is for N 2 , but the available thermodynamic and kinetic data suggest that the concentration of this ion in the ISM should be too small to be detectable [10]. In fusion research, discharge cleaning is used to eliminate the residual molecules in a vacuum vessel, of which oxygen and water are major components [12,13], and oxygen-containing cold plasmas have been proposed for the removal of co-deposits at the reactor walls [14,15]. Hydrogen and oxygen plasmas are also widely used in surface treatments, like chemical modification [16][17][18], decontamination [19] or functionalization of carbon nanotubes [20].…”
Section: Introductionmentioning
confidence: 99%