2013
DOI: 10.1364/oe.21.006286
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Chromatic confocal microscopy with a novel wavelength detection method using transmittance

Abstract: Chromatic confocal microscopy (CCM) is a promising technology that enables high-speed three-dimensional surface profiling without mechanical depth scanning. However, the spectrometer, which measures depth information encoded by axial color, limits the speed of three-dimensional imaging. We present a novel method for chromatic confocal microscopy with transmittance detection. Depth information can be instantaneously obtained by the ratio of intensity signals from two photomultiplier tubes by detecting a peak wa… Show more

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Cited by 52 publications
(24 citation statements)
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“…The experiments were carried out in such a way that the parameter d in Figure 3, which corresponded to the defocus of Detector2 from the focal plane of the fiber coupling lens, was changed from 0 µm to 300 µm in a step of 20 µm, while the focused wavelength at each step was being observed. In the experiments, the deviation of the parameter d (∆d) corresponded to −dF in Equation (15). It should be noted that the positive direction of the parameter d was set to be the one from the fiber detector to the fiber coupling lens.…”
Section: Fiber Coupling Lensmentioning
confidence: 99%
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“…The experiments were carried out in such a way that the parameter d in Figure 3, which corresponded to the defocus of Detector2 from the focal plane of the fiber coupling lens, was changed from 0 µm to 300 µm in a step of 20 µm, while the focused wavelength at each step was being observed. In the experiments, the deviation of the parameter d (∆d) corresponded to −dF in Equation (15). It should be noted that the positive direction of the parameter d was set to be the one from the fiber detector to the fiber coupling lens.…”
Section: Fiber Coupling Lensmentioning
confidence: 99%
“…From the experimental results, the sensitivity dλ/dF was evaluated to be 0.5686 nm/μm. From Equation (15), the contribution of F in P4 was therefore evaluated as dZ/dT = (0.383 μm/°C)•(0.5686 nm/μm)•(−255 nm/nm) = −55.5 nm/°C. Figure 9a.…”
Section: Fiber Coupling Lensmentioning
confidence: 99%
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“…The demand for accurately measuring the 3-dimensional (3-D) shape of various objects has been existing in many industrial and medical fields. Especially, the fast measurement technology of large-area and micro-surface is required in the inspection process of semiconductors, flat panel or plasma displays, and microelectromechanical systems [1][2][3]. In addition, large depth scanning range is needed in dental CAD/CAM industry [4].…”
Section: Introductionmentioning
confidence: 99%
“…Chromatic confocal microscopy uses a broadband light source and an objective with longitudinal chromatic aberrations, which generate multiple, axially-distributed foci depending on wavelength [15][16][17]. Chromatic confocal microscopy has been most widely developed using reflectance imaging for surface profiling, while several studies have investigated fluorescence and nonlinear optical imaging [18][19][20][21]. Differential confocal microscopy, which uses two or more detectors, is another method to measure surface shape with 2-D scans [22][23][24][25][26][27][28].…”
Section: Introductionmentioning
confidence: 99%