2010
DOI: 10.1017/s1551929510991190
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Choosing the Right Accelerating Voltage for SEM (An Introduction for Beginners)

Abstract: Historically, most SEM operators used accelerating voltages that were fairly high, quite often in the range of 15–20 kV. Now progress in electron optics has made low-voltage observations a routine mode of SEM operation. The greatly improved range of utilized accelerating voltages provides the SEM operator with additional flexibility and with additional responsibilities for choosing the right SEM settings for image acquisition.

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Cited by 11 publications
(6 citation statements)
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“…The beam energy determines the maximum energy with which an electron can dissipate to the resist molecule. 24 As shown in Figure 3a, the resistivity of the fabricated material decreases with the increase in the beam energy. The collisions between the incident electrons and the molecules of the precursor result in the kinetic energy transfer of electron to the precursor molecule and lead to their fragmentation; 25 subsequently, the fragments cross-link and form a larger molecule with specific size distribution that is determined by both beam energy and dose.…”
Section: ■ Results and Discussionmentioning
confidence: 88%
See 1 more Smart Citation
“…The beam energy determines the maximum energy with which an electron can dissipate to the resist molecule. 24 As shown in Figure 3a, the resistivity of the fabricated material decreases with the increase in the beam energy. The collisions between the incident electrons and the molecules of the precursor result in the kinetic energy transfer of electron to the precursor molecule and lead to their fragmentation; 25 subsequently, the fragments cross-link and form a larger molecule with specific size distribution that is determined by both beam energy and dose.…”
Section: ■ Results and Discussionmentioning
confidence: 88%
“…The beam acceleration voltage or beam energy and dose are two of the most important parameters. The beam energy determines the maximum energy with which an electron can dissipate to the resist molecule . As shown in Figure a, the resistivity of the fabricated material decreases with the increase in the beam energy.…”
Section: Resultsmentioning
confidence: 99%
“…If the number of sinters increases, it may lead to a change in the microcracks, which results in several void formations in the resin matrix, which, in turn, affects the properties of the composites. From Figure 7, C-4 (b), a cleavage type of surface is seen when the composite contains a graphite filler concentration of 5%, which indicates the insignificant plastic nature of the composite [35]. The shear cups are visualized by shearing the resin matrix when graphite concentration is increased [36].…”
Section: Morphologymentioning
confidence: 99%
“…Alternatively, charging may be overcome by using low beam energies (commonly sub 1 kV); however, this may also alter the level of surface detail that is acquired. A useful resource on selecting the optimum accelerating voltage on an SEM has been put together by Dusevich et al [3].…”
Section: The Challenge Of Imaging Hydrated Tissue In a Vacuummentioning
confidence: 99%