‘Chip-olate’ and dry-film resists for efficient fabrication, singulation and sealing of microfluidic chips

Temiz, Yuksel; Delamarche, Emmanuel

doi:10.1088/0960-1317/24/9/097001

Cited by 22 publications

(9 citation statements)

References 43 publications

(48 reference statements)

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“…We called this technique the ''chip-olate'' process because the singulation of sealed chips from the wafer is as easy as breaking a chocolate bar. We also demonstrated the compatibility of DFR-based sealing technique with capillary-driven microfluidic chips [139] and immunoassays having patterned protein arrays [140].…”

Section: New Prototyping Techniques Providing a Paradigm Shift For Sementioning

confidence: 99%

Lab-on-a-chip devices: How to close and plug the lab?

Temiz

Lovchik

Kaigala

et al. 2015

Microelectronic Engineering

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276

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a b s t r a c tLab-on-a-chip (LOC) devices are broadly used for research in the life sciences and diagnostics and represent a very fast moving field. LOC devices are designed, prototyped and assembled using numerous strategies and materials but some fundamental trends are that these devices typically need to be (1) sealed, (2) supplied with liquids, reagents and samples, and (3) often interconnected with electrical or microelectronic components. In general, closing and connecting to the outside world these miniature labs remain a challenge irrespectively of the type of application pursued. Here, we review methods for sealing and connecting LOC devices using standard approaches as well as recent state-of-the-art methods. This review provides easy-to-understand examples and targets the microtechnology/engineering community as well as researchers in the life sciences.

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Section: New Prototyping Techniques Providing a Paradigm Shift For Sementioning

confidence: 99%

Lab-on-a-chip devices: How to close and plug the lab?

Temiz

Lovchik

Kaigala

et al. 2015

Microelectronic Engineering

Self Cite

410

276

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“…The lateral walls of microchannels were 15 μm high and patterned in SU-8 using a standard photolithography process. Then, chips were partially diced using the “Chip-olate” process 56 and sealed by lamination using a dry fil resist (DF-1050, EMS Inc., USA).…”

Section: Methodsmentioning

confidence: 99%

Programmable hydraulic resistor for microfluidic chips using electrogate arrays

Salva

Temiz

Rocca

et al. 2019

Sci Rep

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Flow rates play an important role in microfluidic devices because they affect the transport of chemicals and determine where and when (bio)chemical reactions occur in these devices. Flow rates can conveniently be determined using external peripherals in active microfluidics. However, setting specific flow rates in passive microfluidics is a significant challenge because they are encoded on a design and fabrication level, leaving little freedom to users for adjusting flow rates for specific applications. Here, we present a programmable hydraulic resistor where an array of “electrogates” routes an incoming liquid through a set of resistors to modulate flow rates in microfluidic chips post-fabrication. This approach combines a battery-powered peripheral device with passive capillary-driven microfluidic chips for advanced flow rate control and measurement. We specifically show a programmable hydraulic resistor composed of 7 parallel resistors and 14 electrogates. A peripheral and smartphone application allow a user to activate selected electrogates and resistors, providing 127 (27-1) flow resistance combinations with values spanning on a 500 fold range. The electrogates feature a capillary pinning site (i.e. trench across the flow path) to stop a solution and an electrode, which can be activated in a few ms using a 3 V bias to resume flow based on electrowetting. The hydraulic resistor and microfluidic chip shown here enable flow rates from ~0.09 nL.s−1 up to ~5.66 nL.s−1 with the resistor occupying a footprint of only 15.8 mm2 on a 1 × 2 cm2 microfluidic chip fabricated in silicon. We illustrate how a programmable hydraulic resistor can be used to set flow rate conditions for laminar co-flow of 2 liquids and the enzymatic conversion of a substrate by stationary enzymes (alkaline phosphatase) downstream of the programmable hydraulic resistor.

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“…35 A fabricated wafer after partial dicing and wafer-level cleaning steps is shown in Figure 2b. Following the partial dicing step (about 300 µm cutting depth), the microfluidic channels were sealed by wafer-level lamination (at 50 °C) of a DF-1050 DFR (Engineered Materials Systems Inc., USA) pre-patterned by an electronic craft cutter.…”

Section: Methodsmentioning

confidence: 99%

Capillary-driven microfluidic chips with evaporation-induced flow control and dielectrophoretic microbead trapping

2014

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This work reports our efforts on developing simple-to-use microfluidic devices for point-of-care diagnostic applications with recent extensions that include the trapping of microbeads using dielectrophoresis (DEP) and the modulation of capillary-driven flow using integrated microheaters. DEP serves the purpose of trapping microbeads coated with receptors and analytes for detection of a fluorescent signal. The microheater is actuated once the chip is filled by capillarity, creating an evaporation-induced flow tuned according to assay conditions. The chips are composed of a glass substrate patterned with 50-nm-thick Pd electrodes and microfluidic structures made using a 20-µm-thick dry-film resist (DFR). Chips are covered/sealed by low-temperature (50 ºC) lamination of a 50-µm-thick DFR layer having excellent optical and mechanical properties. To separate cleaned and sealed chips from the wafer, we used an effective chip singulation technique that we informally call the "chip-olate" process. In the experimental section, we first studied dielectrophoretic trapping of 10 µm beads for flow rates ranging from 80 pL s -1 to 2.5 nL s -1 and that are generated by an external syringe pump. Then, we characterized the embedded microheater in DFR-covered chips. Flow rates as high as 8 nL s -1 were generated by evaporation-induced flow when the heater was biased by 10 V, corresponding to 270 mW power. Finally, DEP-based trapping and fluorescent detection of functionalized beads were demonstrated as the flow was generated by the combination of capillary filling and evaporation-induced flow.

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‘Chip-olate’ and dry-film resists for efficient fabrication, singulation and sealing of microfluidic chips

Cited by 22 publications

References 43 publications

Lab-on-a-chip devices: How to close and plug the lab?

Lab-on-a-chip devices: How to close and plug the lab?

Programmable hydraulic resistor for microfluidic chips using electrogate arrays

Capillary-driven microfluidic chips with evaporation-induced flow control and dielectrophoretic microbead trapping

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