Mass spectrometry has been employed as a diagnostic tool to investigate the decomposition of some zirconium cyclopentadienyl derivatives, namely dimethyl zirconium bis(cyclopentadiene) [ Received 20 June 1998; Revised 5 October 1998; Accepted 7 October 1998 Thin films of zirconium oxide (ZrO 2 ) have been extensively investigated due to their numerous applications related to their valuable chemical and physical properties, such as high melting point, mechanical and thermal resistance, refractive index, dielectric constant and low electrical conductivity. It is therefore largely employed as a refractory material in thermal protective coatings, 1,2 in the production of optical and biocompatible materials, sensors, dielectric layers and, in recent applications, as a catalyst for thermal combustion reactions. [3][4][5] Metal organic chemical vapour deposition (MOCVD) is a suitable technique for obtaining an extensive variety of thin films (and therefore also of ZrO 2 ) by thermal decomposition of appropriate organometallic precursors.
6In previous work, mass spectrometry (MS) has been shown to be a valid tool to investigate the decomposition of precursors that are employed in the MOCVD technique. 7,8 In particular, by performing metastable ion studies on the molecular ion species, it is possible to gain information on the most energetically favoured decomposition channels of the molecule and on the relative metal-ligand bond strengths. MS has already been employed for the structural confirmation of zirconium complexes 9-13 but, to our knowledge, no MS data have been reported till now about the compounds under investigation here, even though different zirconium cyclopentadienyl derivatives have already been studied. Thomas and Brown 12 reported that zirconium cyclopentadienyl carbonyls give (C 5 H 5 ) 2 Zr as the most abundant fragment, while Coutts and Wailes, 13 investigating Cp 2 Zr(N 3 ) 2 , emphasized the presence of further decomposition channels of the cyclopentadienyl ring leading to C 3 H 3 , C 2 H 2 and C 2 H fragments.In the present paper we will discuss the behaviour under electron ionization (EI) conditions of three zirconium complexes, namely dimethyl zirconium bis(cyclopentadiene) [(C 5 H 5 14 In parallel, an investigation based on electrospray ionization (ESI) 15 was undertaken, in order to study the behaviour of 1-3 under internal energy regimes lower than those present in EI conditions: these data could, in principle, be more strictly related to the behaviour of the chemical species in the gas phase typical of MOCVD experiments.
EXPERIMENTALThe three zirconium complexes were synthesized and characterized by infrared (IR) and nuclear magnetic resonance (NMR) spectroscopy as previously reported. 16,17 EI (70 eV, 200 mA) mass spectra were obtained using a VG (Manchester, UK) ZAB 2F 18 mass spectrometer. The samples were introduced directly into the ion source which was heated to 180°C. The probe temperature was 50°C. High-energy-collision mass analyzed ion kinetic energy (MIKE) 19 spectra we...