Abstract:Measurement and Control of the Boron and Phosphorus Concentration in LPCVD Borophosphosilicate Glass-(BPSG). -BPSG glass films of thicknesses in the range of 4000-5000 . ANG. are deposited by a LPCVD process using SiH4 and O2 as the main reactant gases and BCl3 and PH3 as dopant gases. The dopant gas flow rates are systematically varied and the absolute B and P concentration in the films are measured with high accuracy by unique nuclear analysis techniques utilizing neutron beams. The relationship between the … Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.