ChemInform Abstract: Direct Writing of Copper Film Patterns by Laser‐Induced Decomposition of Copper Acetate.

Abstract

It is demonstrated that Cu deposition on alumina substrates (both single line and large area deposition is possible) via decomposition of (AcO)2Cu by a Nd: YAG laser, known for its reliability and low costs, offers an attractive and economical alternative for the fabrication of thin film microcircuits.