Chemical vapour depositedin-situ composites in the system Ti-Si-C

Maline, M.; Hillel, R.; Berjoan, R.

doi:10.1007/bf01133769

Cited by 6 publications

(6 citation statements)

References 12 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Apart from the Si-C scattering band at around 790 cm −1 and second-order TO mode of Si-Si vibration at 960 cm −1 , a band centred at around 1550 cm −1 related to the disorder-induced graphite-like G band [24] can still be made out. Considering that the Raman scattering factor of the Si-C bond is very small and is around 1/40 of the C-C bond [25], it can be deduced that the Si-C bond dominates in these films, as has also been shown in the FTIR analysis. In addition, the scattering band corresponding to the characteristic graphitelike D band [26] is so small that it can hardly be observed in the Raman curves of figure 4(b).…”

Section: Raman Analysessupporting

confidence: 59%

Structural and optical properties of hydrogenated amorphous silicon carbide films by helicon wave plasma-enhanced chemical vapour deposition

Yu¹,

Lu²,

Han³

et al. 2004

J. Phys. D: Appl. Phys.

View full text Add to dashboard Cite

Hydrogenated amorphous silicon carbide (a-Si1−xCx : H) films with different carbon concentrations have been deposited using the helicon wave plasma-enhanced chemical vapour deposition technique under the condition of strong hydrogen dilution. The a-Si1−xCx:H films with carbon content x up to 0.64 have been deposited. Their structural and optical properties are investigated using Fourier transform infrared spectroscopy, Raman scattering, ultraviolet–visible transmittance spectroscopy and x-ray photoelectron spectroscopy. The deposition rate, optical band gap and B factor related to structural disorder are found to monotonically change in the investigated range with methane–silane gas flow ratios. It is found that the deposited films exist with the structure of Si-like clusters and Si–C networks when silicon content is high, while they consist mainly of C-like clusters and Si–C networks for carbon-rich samples. A large optical band gap is obtained in high carbon concentration samples, which is attributed to the high density characteristic of helicon wave plasmas and the strong hydrogen dilution condition.

show abstract

Section: Raman Analysessupporting

confidence: 59%

Structural and optical properties of hydrogenated amorphous silicon carbide films by helicon wave plasma-enhanced chemical vapour deposition

Yu¹,

Lu²,

Han³

et al. 2004

J. Phys. D: Appl. Phys.

View full text Add to dashboard Cite

show abstract

“…X-ray diffraction (XRD) is the easy and rapid way which is generally used to provide such information. However, while cubic Sic-orthorhombic TiSi, mixture could be easily identified from XRD [6], this technique was inefficient in the case of cubic Sic-cubic TiC because of the similarity of their cell parameters [6]. The XRD identification of the hexagonal Ti,SiC, was also difficult due to uncertainties concerning its X-ray diffraction pat-Auger electron spectroscopy (AES) can give valuable information on the nature of the bonds which are present in a solid material.…”

Section: Cvd Coatingsmentioning

confidence: 99%

Auger electron spectroscopy of compounds in the Si-Ti-C system

et al. 1993

Self Cite

View full text Add to dashboard Cite

“…However, while cubic Sic-orthorhombic TiSi, mixture could be easily identified from XRD [6], this technique was inefficient in the case of cubic Sic-cubic TiC because of the similarity of their cell parameters [6]. The XRD identification of the hexagonal Ti,SiC, was also difficult due to uncertainties concerning its X-ray diffraction patAuger electron spectroscopy (AES) can give valuable information on the nature of the bonds which are present in a solid material.…”

Section: Cvd Coatingsmentioning

confidence: 99%

“…In order to achieve the micro-chemical characterization of the Ti-Si-C codeposits prepared by CVD, electron probe microanalysis-wavelength dispersive spectroscopy (EPMA-WDS), X-ray diffraction (XRD), micro-Raman spectroscopy and Auger electron spectroscopy (AES) were undertaken [6].…”

Section: Introductionmentioning

confidence: 99%