1993
DOI: 10.1016/0039-6028(93)90558-2
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Auger electron spectroscopy of compounds in the Si-Ti-C system

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Cited by 9 publications
(1 citation statement)
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“…In the case of the C KLL Auger peak, a shift is observed (from 272 to 277 eV) after 120 min sputtering, indicating different chemical states in that depth [33]. This kind of shift in the C Auger peak towards higher energy is responsible for the compound formation at the interface [34,35]. The shift is also observed for the substrates exposed at 10 • , 15 • and 20 • .…”
Section: Resultsmentioning
confidence: 84%
“…In the case of the C KLL Auger peak, a shift is observed (from 272 to 277 eV) after 120 min sputtering, indicating different chemical states in that depth [33]. This kind of shift in the C Auger peak towards higher energy is responsible for the compound formation at the interface [34,35]. The shift is also observed for the substrates exposed at 10 • , 15 • and 20 • .…”
Section: Resultsmentioning
confidence: 84%