Microstructure of chemically vapour codeposited SiCTiCC nanocomposites

Hillel, R.; Maline, M.; Gourbilleau, Fabrice; Nouet, G.; Carles, R.; Mlayah, Adnen

doi:10.1016/0921-5093(93)90725-t

Cited by 22 publications

(10 citation statements)

References 9 publications

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“…One can see that the carbon band dominates the spectra even at the composition close to the SiC stoichiometry. The reason is probably that the scattering efficiency of the C-C bond is approximately 40 times higher than that of the Si-C bond [19]. The formation of the crystalline SiC structure at the deposition temperature of ∼750°C is indicated also by Raman spectra.…”

Section: Structure Of Sic Filmsmentioning

confidence: 97%

Hardness and elastic modulus of amorphous and nanocrystalline SiC and Si films

Kulikovsky

Vorlı́ček

Boháč

et al. 2008

Surface and Coatings Technology

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Section: Structure Of Sic Filmsmentioning

confidence: 97%

Hardness and elastic modulus of amorphous and nanocrystalline SiC and Si films

Kulikovsky

Vorlı́ček

Boháč

et al. 2008

Surface and Coatings Technology

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“…It should be noted that the film deposited at N 2 /Ar = 0 possesses a small excess of carbon (Si 0.47 C 0.53 ). The higher intensity of carbon band in comparison to Si-Si and Si-C is a result of the higher Raman polarizability of the C-C bond [45].…”

Section: Raman Spectramentioning

confidence: 96%

Mechanical properties of amorphous silicon carbonitride thin films at elevated temperatures

2014

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The mechanical properties of amorphous silicon carbonitride (a-SiC x N y ) films with various nitrogen content (y = 0-40 at.%) were investigated in situ at elevated temperatures up to 650°C in inert atmosphere. A SiC film was measured also at 700°C in air. The hardness and elastic modulus were evaluated using instrumented nanoindentation with thermally stable cubic boron nitride Berkovich indenter. Both the sample and the indenter were separately heated during the experiments to temperatures of 300, 500, and 650°C. Short duration high temperature creep tests (1200 s) of the films were also carried out. The results revealed that the room temperature hardness and elastic modulus deteriorate with the increase of the nitrogen content. Furthermore, the hardness of both the a-SiC and the a-SiCN films with lower nitrogen content at 300°C drops to approx. 77 % of the corresponding room temperature values, while it reduces to 69 % for the a-SiCN film with 40 at.% of nitrogen. Further increase of temperature is accompanied with minor reduction in hardness except for the a-SiCN film with highest nitrogen content, where the hardness decreases at a much faster rate. Upon heating up to 500°C, the elastic modulus of the a-SiCN film decreases, while it increases at 650°C due to the pronounced effect of short-range ordering. The steady-state creep rate increases at elevated temperatures and the a-SiC exhibits slower creep rates compared to the a-SiCN films. The value of the universal constant x = 7 relating the W p /W t and H/E * was established and its applicability was demonstrated. Analysis of the experimental indentation data suggests a theoretical limit of hardness to elastic modulus ratio of 0.143.

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“…For example, SiC-TiC composites have been fabricated by SPS of a mixture of ␤-SiC and TiC powders without additive at 1800 • C. 6 There have also been several studies on in situ fabrication of SiC-TiC composites by chemical vapor deposition (CVD) to produce fine homogeneous composite particles of high purity. [11][12][13][14][15][16] For example, Kawai et al fabricated SiC-TiC ceramics by CVD using a gas mixture of SiCl 4 , TiCl 4 and hydrocarbon. 11 A French group used SiH 2 Cl 2 instead of SiCl 4 as a precursor for the CVD deposition of nanocomposite SiC-TiC-C on carbon substrate.…”

Section: Introductionmentioning

confidence: 99%

“…11 A French group used SiH 2 Cl 2 instead of SiCl 4 as a precursor for the CVD deposition of nanocomposite SiC-TiC-C on carbon substrate. 14,15 Thus, the CVD method can produce fine particles of SiC and/or TiC from gas mixtures at relatively low temperatures (1000-1600 • C). In addition to the fabrication of SiC-TiC composites, layered SiC/TiC ceramics with graded compositions have been fabricated with good mechanical properties.…”

Section: Introductionmentioning

confidence: 99%