Chemical vapor deposition of diamond on an adamantane-coated sapphire substrate

Abstract

Continuous diamond thin films can be grown on sapphire substrates by microwave plasma chemical vapor deposition utilizing a pretreatment of adamantane dip coating on the substrate for enhanced nucleation.

A Study on the Growth Window of Polycrystalline Diamond on Si3N4-coated N-Polar GaN

“…In the case of 5 h growth, partial delamination of the diamond layer was observed from the surface during the cooling cycle at the end of the recipe. We believe this was caused by the large compressive stress in sapphire wafer during the cooling cycle, which was also reported by others [21,40]. This issue elaborated upon more in the next section.…”

Nucleation of diamond films on heterogeneous substrates: a review

“…176 If we compare the diamond growth by Chen et al 174,175 with that of Tiwari et al 173 discussed above, a marginal increase in seeding density can be seen. However, this can be attributed to the solvent 177 even though in the case of Chen et al 174,175 they do not see in any noticeable enhancement in seeding due to the solvents. In both the cases we see seeding density enhancement over spontaneous seeding but the enhancements are not enough to get pinhole free thin diamond lms.…”

“…Similar results were obtained for diamond grown on sapphire. The authors had also reported a thick diamond lm grown on sapphire 175 (see Fig. 20a-c).…”

“…In all the studies [169][170][171][172][173][174][175] discussed so far the smallest member of the diamondoid family was either directly sublimated or deposited on the substrates by dissolving in a solvent. Except for Tsugawa et al 169 the growth temperatures were also well above the sublimation temperature of adamantane ($250 C).…”

Nanodiamonds: From Synthesis and Purification to Deposition Techniques, Hybrids Fabrication and Applications

“…Very recently, to further improve the surface covered by diamond seeds, adamantane (C 10 H 16 ) molecules i.e. subnanometer unit of diamond crystal [113] were deposited on sapphire substrates by dip-coating [114]. Diamond films were grown on these seeded substrates by microwave CVD plasma at 700°C.…”