2021
DOI: 10.1134/s0022476621080187
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Chemical Structure and Functional Properties of Amorphous Boron Carbonitride Films

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Cited by 3 publications
(5 citation statements)
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“…As is known, oxygen-containing groups can contribute to a decrease in the contact angles. The obtained values of the water contact angles are consistent with the literature data for BC x N y films deposited by magnetron sputtering where CA = 50-77 • [95] and 20.7-54.0 • [96].…”
Section: Wettabilitysupporting
confidence: 89%
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“…As is known, oxygen-containing groups can contribute to a decrease in the contact angles. The obtained values of the water contact angles are consistent with the literature data for BC x N y films deposited by magnetron sputtering where CA = 50-77 • [95] and 20.7-54.0 • [96].…”
Section: Wettabilitysupporting
confidence: 89%
“…The magnetron sputtered BC x N y films had values of L c2 equal to 18-30 mN depending on the films' composition [102]. In another study, the values of L c1 = 32 mN and L c2 = 25 mN were obtained for the magnetron sputtered BC x -like film; and critical loads for BC x N y films led in the intervals of L c1 = 12-57 mN and L c2 = 8-41 mN [96].…”
Section: Mechanical Propertiesmentioning
confidence: 90%
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“…The B 1s spectra of the SiBCNO-0 sample revealed the presence of distinct bonding states, namely, boron-rich BC x , B–Si, carbon-rich BC x , B–N, and B–(Si, C, N) 3– x O x , with corresponding binding energies of 188.0, 188.3, 189.9, 191.0, and 192.0 eV . With an increase in nitrogen content in the coatings (SiBCNO-15 and SiBCNO-30 samples), there is a notable alteration in the chemical bonding structure.…”
Section: Resultsmentioning
confidence: 99%
“…These states include Si−C, Si−N, Si−B, and Si−(C, B, N) 4−x O x bindings located at 101.0, 20 101.8, 21 101.9, 22 The B 1s spectra of the SiBCNO-0 sample revealed the presence of distinct bonding states, namely, boron-rich BC x , B−Si, carbon-rich BC x , B−N, and B−(Si, C, N) 3−x O x , with corresponding binding energies of 188.0, 25 188.3, 22 189.9, 25 191.0, 26 and 192.0 eV. 27 With an increase in nitrogen content in the coatings (SiBCNO-15 and SiBCNO-30 samples), there is a notable alteration in the chemical bonding structure. Specifically, the intensity of the carbon-rich BC x component decreases while the intensity of the B−N component increases.…”
Section: Physicochemical Characterization Of Asmentioning
confidence: 98%