2004
DOI: 10.1016/j.apsusc.2003.10.034
|View full text |Cite
|
Sign up to set email alerts
|

Chemical modifications in femtosecond ultraviolet (248 nm) excimer laser radiation-processed polyimide

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

0
15
0

Year Published

2005
2005
2020
2020

Publication Types

Select...
9

Relationship

0
9

Authors

Journals

citations
Cited by 29 publications
(17 citation statements)
references
References 10 publications
0
15
0
Order By: Relevance
“…One particular advantage of applying an excimer laser is that its non-thermal effects make it suitable for machining of polymers. The use of a pulsed excimer laser for the ablation of polyimides has attracted considerable attention in recent years because polyimide films are widely used as substrates for inkjet printer head, flexible printed circuits, motor slot liners, transformer and capacitor insulators, dielectric layers in multi-chip modules, and micro-and nano-electromechanical systems (27)(28)(29)(30)(31).…”
Section: Introductionmentioning
confidence: 99%
“…One particular advantage of applying an excimer laser is that its non-thermal effects make it suitable for machining of polymers. The use of a pulsed excimer laser for the ablation of polyimides has attracted considerable attention in recent years because polyimide films are widely used as substrates for inkjet printer head, flexible printed circuits, motor slot liners, transformer and capacitor insulators, dielectric layers in multi-chip modules, and micro-and nano-electromechanical systems (27)(28)(29)(30)(31).…”
Section: Introductionmentioning
confidence: 99%
“…Excimer laser ablation of polyimides has attracted considerable attention because these polymers possess outstanding key properties, such as thermooxidative stability, high mechanical strength, high modules, excellent electrical and optical properties, and superior chemical resistance, and are ideal for a variety of applications in the electrical and electronics industries. Polyimide films are widely used as substrates for flexible printed circuits, motor slot liners, transformer and capacitor insulators, dielectric layers in multichip modules, and micro- and nano-electromechanical systems (Hergenrother, 2003; Adhi et al, 2004).…”
Section: Introductionmentioning
confidence: 99%
“…Excimer laser ablation of polyimides has attracted considerable attention because these polymers possess outstanding key properties, such as thermooxidative stability, high mechanical strength, high modules, excellent electrical and optical properties, and superior chemical resistance, and are ideal for a variety of applications in the electrical and electronics industries. Polyimide films are widely used as substrates for flexible printed circuits, motor slot liners, transformer and capacitor insulators, dielectric layers in multichip modules, and micro-and nanoelectromechanical systems~Hergenrother, 2003; Adhi et al, 2004!. Since the commercialization of Kapton polyimide~a polyimide based on pyromellitic dianhydride and 4,4 'diaminodiphenylether!, an impressive variety of polyimides has been synthesized~Sroog, 1996; Hamciuc et al, 1997;Schulz et al, 2003;Damaceanu et al, 2009;Sava et al, 2010!. The direct structuring or laser ablation of polyimides by excimer lasers was first described approximately 25 years ago~Andrew et al, 1983;Srinivasan & Braren, 1984!. Laser ablation studies clearly showed that this method caused clean etching of the material with micron-size precision.…”
Section: Introductionmentioning
confidence: 99%
“…The development of novel engineered materials involving the exposure of PI to high energy ionizing radiation is an actively evolving engineering field where the efforts of many researchers are focused. Reports on PI irradiation with electron beams of different energy and exposure to VUV photons (usually in the form of laser irradiation) to improve PI's radiation resistance (e.g., [175]) and surface properties (e.g., [19,[176][177][178][179][180][181]) have been published. Moreover, efforts were undertaken to improve the atomic oxygen (AO) erosion resistance of PI for low Earth orbit (LEO) applications.…”
Section: Discussionmentioning
confidence: 99%