“…Excimer laser ablation of polyimides has attracted considerable attention because these polymers possess outstanding key properties, such as thermooxidative stability, high mechanical strength, high modules, excellent electrical and optical properties, and superior chemical resistance, and are ideal for a variety of applications in the electrical and electronics industries. Polyimide films are widely used as substrates for flexible printed circuits, motor slot liners, transformer and capacitor insulators, dielectric layers in multichip modules, and micro-and nanoelectromechanical systems~Hergenrother, 2003; Adhi et al, 2004!. Since the commercialization of Kapton polyimide~a polyimide based on pyromellitic dianhydride and 4,4 'diaminodiphenylether!, an impressive variety of polyimides has been synthesized~Sroog, 1996; Hamciuc et al, 1997;Schulz et al, 2003;Damaceanu et al, 2009;Sava et al, 2010!. The direct structuring or laser ablation of polyimides by excimer lasers was first described approximately 25 years ago~Andrew et al, 1983;Srinivasan & Braren, 1984!. Laser ablation studies clearly showed that this method caused clean etching of the material with micron-size precision.…”