2018
DOI: 10.1016/j.carbon.2017.12.033
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Chemical and structural analysis of sub-20 nm graphene patterns generated by scanning probe lithography

Abstract: Sub-20 nm patterns have been fabricated by using oxidation scanning probe lithography on epitaxial graphene. The structural and chemical properties of these nanopatterns have been characterized by high resolution transmission electron microscopy, energy dispersive X-ray spectroscopy and electron energy loss spectroscopy. The electron microscopy images reveal that the nanolithography process modifies the graphene monolayer and a thin region of the SiC substrate (1 nm thick). Spatially-resolved electron spectros… Show more

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Cited by 17 publications
(14 citation statements)
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“…Besides the observation of AB interferences in these structural defective systems, we will additionally demonstrate that the approach presented in this work can also be extended to graphene systems containing two parallel graphenic barriers with functional impurities, particularly, including oxygen impurities, which can be experimentally achieved as in refs. [44][45][46][47][48][49][50].…”
Section: Introductionmentioning
confidence: 99%
“…Besides the observation of AB interferences in these structural defective systems, we will additionally demonstrate that the approach presented in this work can also be extended to graphene systems containing two parallel graphenic barriers with functional impurities, particularly, including oxygen impurities, which can be experimentally achieved as in refs. [44][45][46][47][48][49][50].…”
Section: Introductionmentioning
confidence: 99%
“…[90][91][92] Upon following this strategy, sub-20 nm GO patterns were prepared on epitaxial graphene by Garcia recently. [93] More recently, Pingue and coworkers provided insight into the influence of negative bias voltages on the GO patterning preparation, indicating that an enhanced-oxidation will damage graphene layer. [94]…”
Section: Other Lithographic Methodsmentioning
confidence: 99%
“…This allowed for the preparation of GO patterns on a graphene film ( Figure ). [ 87 ] In a typical procedure, the as‐prepared graphene sheet was deposited on a substrate, followed by depositing metal electrodes on the graphene surface. Afterward, the AFM tip was negatively biased with respect to the graphene (which was electrically grounded), whereby the graphene area contacted by the tip was oxidized, whereas the other regions remained intact.…”
Section: Top‐down Routementioning
confidence: 99%