2005
DOI: 10.1109/radecs.2005.4365610
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Charge Collection Measurements on SOI Capacitors using Heavy Ion Microprobe at GSI

Abstract: Quantitative charge collection measurements have been performed on SOI capacitors using a58N33+ micro beam at 3.6 MeV/u. Collection efficiencies as well as charge sharing effects on adjacent devices through coincidence measurements are reported and discussed in the frame of comparisons between Synopsys code simulations and experimental results

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