2009
DOI: 10.1016/j.nimb.2009.03.054
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Charge collection efficiency mapping of interdigitated 4H–SiC detectors

Abstract: a b s t r a c tThe Ion Beam Induced Charge (IBIC) technique was used to map the charge collection efficiency (CCE) of a 4H-SiC photodetector with coplanar interdigitated Schottky barrier electrodes and a common ohmic contact on the back side.IBIC maps were obtained using focused proton beams with energies of 0.9 and 1.5 MeV, at different bias voltages and different sensitive electrode configurations (charge collection at the top Schottky or at the back Ohmic contact).These different experimental conditions hav… Show more

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Cited by 9 publications
(3 citation statements)
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“…From the full width at half maximum (FWHM) of the Gaussian fit of the derivative of the experimental data a strip broadening of 4.3 µm was calculated, with a clear broadening with respect to the intrinsic vertical size of the micro-focused XR beam (2.6 µm). This effect is due both to the lateral diffusion of minority photogenerated carriers towards the depleted region and to the non-uniformity of the electric-field distribution at the edge of the metal strip, as previously observed in ion-beam-induced charge (IBIC) maps on similar multi-electrode structures [15]. The smoothing of pixel sensitivity from the plateau behaviour does not occur entirely outside the metal strip but also partially extends underneath the electrode, as clearly indicated by the position of the electrode edge reported in fig.…”
mentioning
confidence: 56%
“…From the full width at half maximum (FWHM) of the Gaussian fit of the derivative of the experimental data a strip broadening of 4.3 µm was calculated, with a clear broadening with respect to the intrinsic vertical size of the micro-focused XR beam (2.6 µm). This effect is due both to the lateral diffusion of minority photogenerated carriers towards the depleted region and to the non-uniformity of the electric-field distribution at the edge of the metal strip, as previously observed in ion-beam-induced charge (IBIC) maps on similar multi-electrode structures [15]. The smoothing of pixel sensitivity from the plateau behaviour does not occur entirely outside the metal strip but also partially extends underneath the electrode, as clearly indicated by the position of the electrode edge reported in fig.…”
mentioning
confidence: 56%
“…Highquality large-area x-ray detectors based on SiC Schottky diodes, and high-energy particle (alpha and beta particles) detectors have been demonstrated. The particle detectors are based on the interaction between the charges of the incident particles and the orbital electrons of the absorber atoms (e.g., SiC) [15][16][17]. The operation of conventional radiation detectors, which are generally based on Ge or Si as the absorber atoms, is limited by the radiation damage threshold and thermal stability of the absorber material.…”
Section: Introductionmentioning
confidence: 99%
“…The primary questions for charge readout of SiC are whether complete charge collection is achievable in monolithic, insulating samples, and whether charge collection varies across polytypes. While full charge collection for the 4H polytype has been demonstrated [61], detailed studies of charge collection efficiency suggest that semiinsulating samples have a fairly limited charge diffusion length at room temperature [62]. In Ref.…”
Section: Charge Collectionmentioning
confidence: 99%