Characterizing the Two- and Three-Dimensional Resolution of an Improved Aberration-Corrected STEM

Abstract

The successful development of third-order aberration correctors in transmission electron microscopy has seen aberration-corrected electron microscopes evolve from specialist projects, custom built at a small number of sites to common instruments in many modern laboratories. Here we describe some initial results illustrating the two- and three-dimensional (3D) performance of an aberration-corrected scanning transmission electron microscope with a prototype improved aberration corrector designed to also minimize fifth-order aberrations and a new, higher brightness gun. We show that atomic columns separated by 0.63 A can be resolved and demonstrate detection of single dopant atoms with 3D sensitivity.

4D-Data Acquisition in Scanning Confocal Electron Microscopy for Depth-Sectioned Imaging

“…3. While a similar depth-sectioning technique has been reported in the literature [38][39][40][41][42][43][44][45][46][47][48][49][50][51][52][53][54], we note that all the Co particles in the view field are observed irrespective of the used defocus values.…”

Double oxide shell layer formed on a metal nanoparticle as revealed by aberration corrected (scanning) transmission electron microscopy

“…Firstly a HAADF image of a particle was selected ( Figure 4(a and b) reproduced from Figure 3(c)). Note that this particle neither has a crystallographic zone axis aligned with the electron beam nor any apparent defects within the core Having the crystalline zone axis aligned to the electron beam [34] and the presences of defects [35] can both affect the HAADF image intensity. From these assumptions a geometric model of the particle is produced (Figure 4(c)) and finally a derived HAADF image (Figure 4(d)).…”

Simulation of Spatially Resolved Electron Energy Loss Near-Edge Structure for Scanning Transmission Electron Microscopy

“…Continuing advances in scanning transmission electron microscopy (STEM), including aberration-correction and enhanced stability, have made possible imaging of thin films, interfaces and individual impurities with subAngström resolution [1][2][3][4][5]. Increased probe currents and post-specimen optics have also enabled atomic-resolution imaging based on core-level electron-energy-loss spectroscopy (EELS).…”