Characterizing mechanical resonators by means of a scanning acoustic force microscope

Sthal, F.; Bourquin, R.

doi:10.1063/1.1311317

Cited by 11 publications

(4 citation statements)

References 19 publications

(15 reference statements)

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“…The Scanning Microdeformation Microscope (SMM) can be used to image surface and subsurface defects or to characterize the local elastic constants of the investigated sample [1][2][3].…”

Section: Principle Of the Scanning Microdeformation Microscopymentioning

confidence: 99%

Resonant LGS microsensor for scanning microdeformation microscopy

Douchet

Sthal

Bigler

et al. 2009

2009 IEEE International Ultrasonics Symposium

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Scanning microdeformation microscopy (SMM) is a near field microscopy in the mesoscopic domain. Such a microscope has become an alternative to the high resolution acoustic microscope that operates at very high frequencies. SMM is based on a vibrating contact tip and piezoelectric detection. The lateral resolution is essentially related to the tip diameter. Classically, the SMM sensor is obtained by a complex mounting process. The tip is glued on a Si cantilever driven by a piezoelectric ceramic. Piezoelectric crystal is an alternative to get a monolithic vibrating cantilever. Quartz crystal, which is the most often used piezoelectric material, can be advantageously replaced by Langasite crystal because of its higher piezoelectric coefficients and its better temperature behaviour.

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“…The Scanning Microdeformation Microscope (SMM) can be used to image surface and subsurface defects or to characterize the local elastic constants of the investigated sample [1][2][3].…”

Section: Principle Of the Scanning Microdeformation Microscopymentioning

confidence: 99%

Resonant LGS microsensor for scanning microdeformation microscopy

Douchet

Sthal

Bigler

et al. 2009

2009 IEEE International Ultrasonics Symposium

Self Cite

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“…[13][14][15] The SAM is a tool for the study of the physical properties of materials and has been used for imaging interior structures and for nondestructive evaluation. In the SAM, thin film sample is coated on the QCR surface.…”

Section: Topographic Images Of Longitudinal Qcr Probementioning

confidence: 99%

<title>Fast-scanning near-field scanning optical microscopy using a high-frequency dithering probe</title>

Seo

Jhe

2001

SPIE Proceedings

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We suggest two methods attaching tip to the quartz crystal resonator to be applied to a near-field optical scanning microscope probe. High-speed near-field scanning optical microscopy images obtained with the quartz crystal resonator probe are presented. We have achieved fast scanning imaging at the scanning speed of 1.3 mm/s without any compromise of spatial lateral resolution. Applying a concept of the acoustic wave, the topographic image of soft sample with the quartz crystal resonator probe is interpreted.

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“…The spring constant k and the quality factor of quartz tuning forks have motivated the attempt to achieve atomic resolution [1]. Piezoelectric tuning forks have the advantage of self sensing [2]. The use of optics is not necessary and operation in ultrahigh vacuum and low temperatures are easily implemented.…”

Section: Introductionmentioning

confidence: 99%

Resonant langasite microsensor for atomic force microscopy

Douchet

Sthal

Bigler

et al. 2009

2009 IEEE International Frequency Control Symposium Joint With the 22nd European Frequency and Time Forum

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Quartz length-extension resonators have already been used to get atomically-resolved imaging by frequencymodulation atomic force microscopy. New piezoelectric materials such as Langasite could be appropriate for this application. Theoretical study is reported on length extension resonators in this material. In this paper, an attempt to fabricate micro resonators in Langasite temperature-compensated cuts is prospected. The pointed tip of the micromachined cantilever can be used for atomic force microscopy applications.

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Characterizing mechanical resonators by means of a scanning acoustic force microscope

Abstract: Articles you may be interested inLine edge roughness characterization with a three-dimensional atomic force microscope: Transfer during gate patterning processes

Cited by 11 publications

References 19 publications

Resonant LGS microsensor for scanning microdeformation microscopy

Resonant LGS microsensor for scanning microdeformation microscopy

<title>Fast-scanning near-field scanning optical microscopy using a high-frequency dithering probe</title>

Resonant langasite microsensor for atomic force microscopy

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