We present a quantitative study of the second voltage derivative (SD) of ballistic electron emission spectra of Au͞GaAs͞AlGaAs heterostructures to probe the effect of electron scattering on these spectra. Our analysis of the SD spectra shows that strong electron scattering occurs at the nonepitaxial Au͞GaAs interface, leading to an experimentally observed redistribution of current among the electron transport channels. We also show that the effects of hot-electron scattering inside the semiconductor modify the spectra and are sensitive to the heterojunction band structure, its geometry, and temperature. [S0031-9007(99)09041-9] PACS numbers: 72.10.Fk, 73.20.At, 73.40.Kp, 73.50.Gr Ballistic electron emission microscopy (BEEM), a three-terminal modification of scanning tunneling microscopy, has recently been shown to be a powerful tool for nanometer-scale characterization of the spatial and electronic properties of semiconductor structures. Since the pioneering work of Kaiser and Bell [1], the capability of BEEM to probe the electronic properties of semiconductors on the local scale has been demonstrated for several systems, including Schottky contacts [2-4] and buried heterojunctions [5][6][7].The shape of the BEEM spectrum in the threshold region has to be known in order to derive the correct Schottky or heterojunction barrier energies. Several theoretical models were developed to describe the experimental BEEM spectra. Two commonly used models, based on a planar tunneling formalism [8] and on the transverse momentum conservation at the metal-semiconductor (m-s) interface, are the Bell-Kaiser (BK) model [9] and the Ludeke-Prietsch (LP) model [10]. The LP model extends the original BK theory to include the energydependent electron mean free path (mfp) in the metal base layer and the quantum mechanical transmission at the m-s interface. Experimentally distinguishing between the BK and LP models is still difficult, because the quantitative difference between them is comparable with the experimental error, and both of them can fit experimental data reasonably well [6,11,12]. Recently, BEEM theory was extended to the case of buried heterostructures [13], where transmission at the heterojunction interfaces in addition to the m-s interface was considered.The assumption of transverse momentum conservation, made in the above models, is questionable for the case of nonepitaxial m-s interfaces, which are not atomically abrupt. A deviation from the ballistic picture was experimentally observed, e.g., for Au͞Si [14], Pd͞Si [15], and Au͞GaAs [1,6]. To consider electron scattering at the m-s interface, the m-s interface-induced scattering (MSIS) model was proposed in Ref. [16]. In the strong scattering limit, this model was found to describe the absolute magnitude of the experimentally observed BEEM current for Au͞GaAs and Au͞Si systems. However, since the observed BEEM spectra are a superposition of current contributions from several different transport channels, it is difficult to conclusively extract the different conducti...