1998
DOI: 10.1016/s0040-6090(97)00838-9
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Characterization of titanium nitride (TiN) films on various substrates using spectrophotometry, beam profile reflectometry, beam profile ellipsometry and spectroscopic beam profile ellipsometry

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Cited by 31 publications
(16 citation statements)
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“…The reflected beam goes through several beam splitters (BS4, BS2 and BS3), and then pass through a quarter wave plate, before being collected by a high resolution CCD camera. This optical characterization technique, that we call Reflectometry at Profile Level (RPL), was developed in collaboration with Nightingale EOS [9], and it is a variation of two former techniques, Beam Profile Reflectometry and Beam Profile Ellipsometry [10][11][12]. The more remarkable characteristics are that the system collects the reflectivity of a variety of angles of incidence and polarization states with a single measurement, and with a sub-micrometric spot size.…”
Section: Methodsmentioning
confidence: 99%
“…The reflected beam goes through several beam splitters (BS4, BS2 and BS3), and then pass through a quarter wave plate, before being collected by a high resolution CCD camera. This optical characterization technique, that we call Reflectometry at Profile Level (RPL), was developed in collaboration with Nightingale EOS [9], and it is a variation of two former techniques, Beam Profile Reflectometry and Beam Profile Ellipsometry [10][11][12]. The more remarkable characteristics are that the system collects the reflectivity of a variety of angles of incidence and polarization states with a single measurement, and with a sub-micrometric spot size.…”
Section: Methodsmentioning
confidence: 99%
“…This I 1 and I 2 will be used as the ellipsometric parameters in the measurement, instead of the conventional tanΨ and ∆ pair. It is easy to show that this back focal plane spatial technique is equivalent to a quad detection used in some back focal plane ellipsometry techniques 28 . However, this spatial filtering allows us to do ellipsometric measurements in parallel to form a two-dimensional image without scanning.…”
Section: Imaging Ellipsometer Using a High Na Lensmentioning
confidence: 99%
“…This approach uses a high NA lens for illumination. The reflected light polarization altered by reflection from the sample surface is analyzed at the back focal plane of the high NA lens 27,28,29,30 . Back focal plane ellipsometry has high spatial resolution.…”
Section: Imaging Ellipsometer Using a High Na Lensmentioning
confidence: 99%
“…Since exhibiting a series of chemical and physical properties, such as chemical stability, special optical properties useful for solar devices, interesting electronic properties and advantageous mechanical properties for technological applications, titanium oxide and oxinitride films obtained by various methods are intensively studied in the last years [1][2][3][4][5]. Among them, a particular class is formed by the multilayered coatings with special properties available for new optical applications, microelectronics and other fields [6][7][8][9][10].…”
Section: Introductionmentioning
confidence: 99%