Characterization of TiOxNy Films Grown by PECVD Method: Structural and Optical Properties

Jung, Chan‐Hee; Bae, I.-S.; Song, Young Hoon; Cho, S.J.; Boo, Jin Hyo

doi:10.4028/www.scientific.net/ssp.111.151

Cited by 6 publications

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References 14 publications

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“…The reactive sputtering process was found to be improved by pulsing the O 2 flow rate [23]. Titanium oxynitride films were prepared also by RF PECVD (plasma enhanced chemical vapor deposition) [24] and low pressure MOCVD [19,25,26]. An overview of the literature reveals few studies on TiO x N y coatings grown by CVD compared to PVD processes.…”

Section: Introductionmentioning

confidence: 99%

TiOxNy coatings grown by atmospheric pressure metal organic chemical vapor deposition

Maury

Duminica

2010

Surface and Coatings Technology

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, Florin-Daniel Duminica. TiOxNy coatings grown by atmospheric pressure metal organic chemical vapor deposition. Surface and Coatings Technology, Elsevier, 2010, vol. 205, pp. 1287-1293. 10.1016/j.surfcoat.2010 Open Archive TOULOUSE Archive Ouverte (OATAO)OATAO is an open access repository that collects the work of Toulouse researchers and makes it freely available over the web where possible. Any correspondance concerning this service should be sent to the repository administrator: staff-oatao@inp-toulouse.fr. Titanium oxynitride coatings were deposited on various substrates by an original atmospheric pressure metal organic chemical vapor deposition (MOCVD) process using titanium tetra-iso-propoxide as titanium and oxygen precursors and hydrazine as a nitrogen source. The films composition was monitored by controlling the N 2 H 4 mole fraction in the initial reactive gas phase. The variation of the N content in the films results in significant changes in morphological, structural and mechanical properties. When a large excess of the nitrogen source is used the resulting film contains ca 17 at % of nitrogen and forms dense and amorphous TiO x N y films. Growth rates of these amorphous TiO 1.5 N 0.5 coatings as high as 14 μm/h were obtained under atmospheric pressure. The influence of the deposition conditions on the morphology, the structure, the composition and the growth rate of the films is presented. For the particular conditions leading to the growth of amorphous TiO 1.5 N 0.5 coatings, first studies on the mechanical properties of samples grown on stainless steel have revealed a high hardness, a low friction coefficient, and a good wear resistance in unlubricated sliding experiments against alumina which make them very attractive as protective metallurgical coatings.

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Section: Introductionmentioning

confidence: 99%

TiOxNy coatings grown by atmospheric pressure metal organic chemical vapor deposition

Maury

Duminica

2010

Surface and Coatings Technology

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“…Partially oxidized TiN, or oxynitride (TiNxOy) has garnered considerable interest due to its properties dependence on the N:O ratio [42][43][44][45]. Various forms of TiNxOy films were prepared using pulsed-laser deposition [46], magnetron sputtering [47,48] and plasma enhanced chemical vapour deposition [49]. Thus, direct oxidation of TiN can provide an easy and low-cost method to prepare nitrogen-doped TiO2.…”

Section: Project Motivationmentioning

confidence: 99%

Study of nanostructured semiconductor metal oxide as visible-light photocatalyst

Tan¹

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Since the discovery of the "Fujishima-Honda" effect almost five decades ago, research on photocatalyst effect has been extensive and wide applications have been developed. These include water-splitting, removal of volatile-organic-compounds (VOCs), as well as disinfection for improved air and water quality. In recent years, there have been increasing global awareness to adopt more environmental-friendly approaches. Therefore, photocatalytic oxidation (PCO) process provides a clean alternative for disinfection and removal of environment pollutants and industrial wastes. The current market leader, titanium dioxide (TiO2) is limited by its large bandgap of 3.2 eV to be efficient only under UV light. In this research project, a low-cost and simple process which allows large-scale preparation of nitrogen-doped TiO2 was firstly explored and presented. By oxidizing nano-sized titanium nitride (TiN) powder, mixed phase TiO2 with visible-light absorption up to 525 nm was obtained. The powder oxidized at 500 °C demonstrated good Rhodamine B and gaseous toluene removal; in addition to E. Coli killing under the illumination of fluorescent light with λ > 435 nm. High-resolution X-ray photoelectron spectroscopy (XPS) was used to investigate the binding states of the nitrogen dopants and their effects on the overall photocatalytic performance. The charge separation efficiency was also studied through the powders' surface photovoltage spectra and enhanced separation was observed at higher annealing temperature. Next, this project explored a new, potential candidate for visible-light active semiconductor photocatalyst with tailorable bandgap; in the form of strontium titanate Summary ii ferrite (Sr(Ti1-xFex)O3-δ). Based on previous successful work by our research group on high energy ball-milled Sr(Ti1-xFex)O3-δ nanopowder, the project aim was to develop a fabrication process for Sr(Ti1-xFex)O3-δ thin films using sol-gel approach. Using a modified sol-gel based on Pechini's method of polymerizable metal complex, Sr(Ti1-xFex)O3-δ thin films for the whole range of 0 ≤ x ≤ 1 had been successfully fabricated and characterized for its potential as visible-light photocatalyst. The devised fabrication protocol had produced uniformly coated thin films with good adhesion. The thin films had nanoporous surfaces which are beneficial for applications which require large surface-to-volume ratio. Optical study revealed bandgap reduction from 3.46 eV to 1.10 eV with increasing iron content. However, evaluation of their photocatalytic potential using Rhodamine B, bis-phenol A and stearic acid did not show obvious photocatalytic reaction despite their bandgaps which are in the visible-light range. Further investigation using XPS study showed the formation of oxygen vacancies needed to maintain charge balance. These defects can act as electron traps which prevented charge transfer to the film surface. Furthermore, the electronic conductivity of the films also increased with iron content. As a result, the films were unable to retain charge carriers...

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“…Tentou-se a remoção utilizando-se uma segunda anodização a 120 V por 1 min;  Separação química: uso de uma solução de 0,1 M de HCl por 1 h para corroer e separar a base dos nanotubos de TiO2 do substrato de titânio, sendo que foi tentada uma solução de até 1 M de HCl por 24 h. Além das tentativas de descolamento da membrana, constatou-se também que durante os polimentos para reaproveitamento de lâminas de Ti após cumprirem seu papel na realização deste trabalho, foi possível observar que os nanotubos de TiO2 nitretados são muito mais resistentes ao ataque da solução de polimento (HNO3 + HF4 + CH3COOH, na razão 3:1:1 em volume). Isto de certa forma era esperado já que como Jung [56] constatou em seu trabalho, compostos na forma de oxinitretos metálicos (TiOxNy no caso) possuem um incremento na resistência à corrosão química e à abrasão em relação a compostos óxidos metálicos.…”

Section: ª Etapa -Nitretaçãounclassified

Produção, caracterização morfológica e nitretação de nanotubos de TiO2.

Bonelli¹

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In recent years, metal oxides have been widely studied for a number of applications in the electronics and metallurgical industry, being used in anticorrosive coatings, chemical sensors, sensitive optoelectronic devices, among others. Among the metal oxides, TiO2 (titanium oxide) has enormous potential in applications such as gas sensor, pH sensor and in photosensitive devices such as dye sensitized solar cells and for photocatalytic degradation of organic compounds. There are several morphologies that can be obtained for TiO2, but the most interesting one today is ordered arrangements of TiO2 nanotubes produced by the Ti anodization process, which have a larger surface area than other morphologies such as thin films, nanopillars and nanobastones, also presents greater sensitivity to the presence of the gases and/or solutions to be analyzed, as well as greater absorption of photons, besides a smaller recombination of electron-hole pairs in the material. Despite these several advantages, the photocatalytic activity of TiO2 is limited by absorbing only ultraviolet radiation due to its wide gap of approximately 3.2 eV. Thus, in this work, TiO2 nanotubes were produced by the anodic oxidation process of Ti, with different parameters, correlating them with the resulting morphology. With this, it was possible to observe that the length and external diameter of the TiO2 nanotubes grow proportionally with the increase of the voltage, being approximately linear up to a given value of saturation. The exception to this relates to TiO2 nanotubes grown from Ti deposited and glass substrates, in which, there is a limitation of Ti to be anodized, so that after the total conversion of Ti to oxide, there is no longer growth of nanotubes, but the diameters generated respect the same values for cases in which there is no such limitation. The as grown TiO2 nanotubes were submitted to nitriding processes in a plasma assisted chemical vapor deposition reactor and the parameters were evaluated in order to find the best conditions to decrease their gap in order to increase their photocatalytic activity. Pressure and radio frequency power were varied from 0.66 to 2.66 mBar (0.50 to 2.00 Torr) and 0.22 to 3.51 W/cm 2 respectively. The largest decrease in the gap value, to 2.80 eV, was obtained using the pressure of 1.33 mbar (1.00 Torr), 1.57 W/cm 2 of radio frequency power during a process of 2 h in 320 °C, leading to a 14% decrease in gap value and a 25% increase in photocatalytic activity (reduction of Methylene Blue). This decrease in the value of the optical gap doubles the absorption range of photons from 5% to 10% of the solar spectrum. The nitrided TiO2 nanotubes produced with a gap of 2.80 eV were easily integrated into a microchannel of polydimethylsiloxane, producing a photocatalytic device for the study of photodegradation of organic compounds, and could be used to reduce pollutants. The photocatalytic device completely reduced 5 L of Methylene Blue solution in about 12 min, with an approximately linear rate of 130 M/h, where...

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Characterization of TiOxNy Films Grown by PECVD Method: Structural and Optical Properties

Cited by 6 publications

References 14 publications

TiOxNy coatings grown by atmospheric pressure metal organic chemical vapor deposition

TiOxNy coatings grown by atmospheric pressure metal organic chemical vapor deposition

Study of nanostructured semiconductor metal oxide as visible-light photocatalyst

Produção, caracterização morfológica e nitretação de nanotubos de TiO2.

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