Characterization of the mechanical properties and failure modes of hard coatings deposited by RF magnetron sputtering

Luo, Fei; Gao, Kewei; Pang, Xiaolu; Yang, Huisheng; Li, Qiao; Wang, Yanbin

doi:10.1016/j.surfcoat.2007.12.020

Cited by 24 publications

(11 citation statements)

References 18 publications

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“…At higher oxygen flow rates both the hardness and elastic modulus decreased significantly. Similar results have been reported in the literature [38].…”

Section: Structural Characterizationsupporting

confidence: 93%

Growth and characterization of chromium oxide coatings prepared by pulsed-direct current reactive unbalanced magnetron sputtering

Barshilia

Rajam

2008

Applied Surface Science

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“…At higher oxygen flow rates both the hardness and elastic modulus decreased significantly. Similar results have been reported in the literature [38].…”

Section: Structural Characterizationsupporting

confidence: 93%

Growth and characterization of chromium oxide coatings prepared by pulsed-direct current reactive unbalanced magnetron sputtering

Barshilia

Rajam

2008

Applied Surface Science

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“…Bulk Cr 2 O 3 is one of the hardest oxides, with a hardness of 29.5 GPa [1][2][3][4], and can be deposited as a protective coating for many purposes, due to its high wear resistance, low coefficient of friction, and excellent corrosion resistance [5][6][7]. Many methods, including plasma-spray [8][9][10], sputtering [11,12], chemical vapor deposition (CVD) [13], and pulsed laser deposition [14], have been used to produce Cr 2 O 3 coatings. However, among them, only sputtering techniques have so far been successful in producing Cr 2 O 3 coatings with a hardness value close to that of bulk Cr 2 O 3 [3,12,15,16].…”

Section: Introductionmentioning

confidence: 99%

“…Many methods, including plasma-spray [8][9][10], sputtering [11,12], chemical vapor deposition (CVD) [13], and pulsed laser deposition [14], have been used to produce Cr 2 O 3 coatings. However, among them, only sputtering techniques have so far been successful in producing Cr 2 O 3 coatings with a hardness value close to that of bulk Cr 2 O 3 [3,12,15,16]. Nevertheless, chromium oxide coatings deposited by sputtering methods can also show weak mechanical properties if appropriate deposition parameters are not selected during the deposition process.…”

Section: Introductionmentioning

confidence: 99%

The Effect of Deposition Parameters on the Structure and Mechanical Properties of Chromium Oxide Coatings Deposited by Reactive Magnetron Sputtering

Mohammadtaheri

Yang

et al. 2018

Coatings

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Appropriate conditions for depositing hard Cr 2 O 3 coatings by reactive sputtering techniques have yet to be defined. To fill this gap, the effect of principal deposition parameters, including deposition pressure, temperature, Cr-target voltage, and Ar/O 2 ratio, on both the structure and mechanical properties of chromium oxide coatings was investigated. A relationship between processing, structure, and the mechanical properties of chromium oxide coatings was established. Scanning electron microscopy (SEM), X-ray diffraction (XRD), Raman spectroscopy, and X-ray Photoelectron Spectroscopy (XPS) were used to characterize the morphology, structure, and chemical compositions of the coatings that were prepared. An optical profilometer was employed to measure both the roughness and thickness of the coatings. The hardness and Young's modulus of the coatings both as-deposited and after annealing conditions were measured by nanoindentation. The results showed that depositing hard Cr 2 O 3 coatings is a highly critical task, requiring special deposition conditions. Cr 2 O 3 coatings with a high hardness of approximately 25 GPa could be achieved at room temperature, at a low pressure of 1.6 × 10 −1 Pa, where Cr-target voltage and oxygen content were 260 V and between 15-25 vol % of total gas, respectively. A dense stoichiometric Cr 2 O 3 structure was found to be responsible for the high chromium oxide coating hardness observed.

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“…[6][7][8][9][10][11][12]. However, the temperature dependent wear behaviour of these coatings and the role of oxygen on their wear behaviour is not investigated.…”

Section: Introductionmentioning

confidence: 99%

The effect of oxygen content on the temperature dependent tribological behavior of Cr–O–N coatings

Ürgen

Ezirmik

Şenel

et al. 2009

Surface and Coatings Technology

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Characterization of the mechanical properties and failure modes of hard coatings deposited by RF magnetron sputtering

Cited by 24 publications

References 18 publications

Growth and characterization of chromium oxide coatings prepared by pulsed-direct current reactive unbalanced magnetron sputtering

Growth and characterization of chromium oxide coatings prepared by pulsed-direct current reactive unbalanced magnetron sputtering

The Effect of Deposition Parameters on the Structure and Mechanical Properties of Chromium Oxide Coatings Deposited by Reactive Magnetron Sputtering

The effect of oxygen content on the temperature dependent tribological behavior of Cr–O–N coatings

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