2021
DOI: 10.1088/1361-6528/abd3ca
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Characterization of the inhomogeneity of Pt/CeO x /Pt resistive switching devices prepared by magnetron sputtering

Abstract: There are unrevealed factors that bring about the performance variations of resistive switching devices. In this work, Pt/CeO x /Pt devices prepared by magnetron sputtering showed rectification in their asymmetrical current–voltage (I–V) curves during voltage sweeps. X-ray photoelectron spectroscopy showed that the deposited CeO x film had an inhomogeneous composition, and more oxygen vacancies existed in CeO x … Show more

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Cited by 6 publications
(4 citation statements)
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“…Annealing in air can also remarkably reduce the oxygen vacancy concentration in CeO x , which has been proven in our previous work [28]. After annealing in an air atmosphere, the Ce 3+ in CeO x lost an electron and was oxidized to Ce 4+ , which was accompanied by the elimination of oxygen vacancies.…”
Section: Journal Of Nanomaterialssupporting
confidence: 66%
“…Annealing in air can also remarkably reduce the oxygen vacancy concentration in CeO x , which has been proven in our previous work [28]. After annealing in an air atmosphere, the Ce 3+ in CeO x lost an electron and was oxidized to Ce 4+ , which was accompanied by the elimination of oxygen vacancies.…”
Section: Journal Of Nanomaterialssupporting
confidence: 66%
“…The work functions of the top-Pt and bottom-ITO electrodes are 5.65 were 4.4 eV, respectively. 54,55 Additionally, the electron affinity and band gap of the WO x film were 3.64 and 3.01 eV, respectively (Figure 3a). 56 Owing to the difference in work functions of the two metallic electrodes, asymmetric Schottky barriers are formed at the Pt/WO x and WO x /ITO interfaces, with the larger of the two barriers formed at the Pt/WO x surface, as shown in Figure 3a.…”
Section: ■ Results and Discussionmentioning
confidence: 99%
“…These materials are not only compatible with CMOS circuits but are also widely used in RRAMs. CeO 2 is a naturally synthesized material with a single Ce 4+ ion and two O 2− ions, but cerium oxide deposited by sputtering has an amorphous formation [ 52 ]. The sputtering deposited CeO 2−x has numerous oxygen vacancies (V o ) within the material layer.…”
Section: Introductionmentioning
confidence: 99%