Characterization of super-resolution photolithography

Fukuda, Hiroshi; Yamanaka,; Terasawa,; Hama,; Tawa,; Okazaki,

doi:10.1109/iedm.1992.307306

Cited by 3 publications

(2 citation statements)

References 4 publications

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“…56,108 Arsenic-containing hydrocarbons (AsHCs) are present in various aquatic systems, such as herring, 225 tuna, 226 cod, 227 fish oils, 224,228,229 and edible brown algae. 220,223,230 AsLipids occur as derivatives of fatty acids (AsFAs), 37,110,220,225,228,229,[231][232][233][234][235][236][237] hydrocarbons (AsHC), 37,110,220,225,228,229,231,[233][234][235][236][237][238] phosphatidylethanolamine (AsPE), 239,240 phosphatidylcholine (AsPC), [239][240][241] fatty alcohols, 231 and AsSugar-PLs. 184,220 The existence of arsenic in lipid extracts of fish and algae was originally documented by Lunde in 1968, 242 but their structures remained unknown.…”

Section: Arsenolipids (Aslipids)mentioning

confidence: 99%

Organoarsenicals in Seafood: Occurrence, Dietary Exposure, Toxicity, and Risk Assessment Considerations – A Review

Luvonga

Rimmer

et al. 2020

J. Agric. Food Chem.

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Diet, especially seafood, is the main source of arsenic exposure for humans. The total arsenic content of a diet offers inadequate information for assessment of the toxicological consequences of arsenic intake, which has impeded progress in the establishment of regulatory limits for arsenic in food. Toxicity assessments are mainly based on inorganic arsenic, a well-characterized carcinogen, and arsenobetaine, the main organoarsenical in seafood. Scarcity of toxicity data for organoarsenicals, and the predominance of arsenobetaine as an organic arsenic species in seafood, has led to the assumption of their nontoxicity. Recent toxicokinetic studies show that some organoarsenicals are bioaccessible and cytotoxic with demonstrated toxicities like that of pernicious trivalent inorganic arsenic, underpinning the need for speciation analysis. The need to investigate and compare the bioavailability, metabolic transformation, and elimination from the body of organoarsenicals to the well-established physiological consequences of inorganic arsenic and arsenobetaine exposure is apparent. This review provides an overview of the occurrence and assessment of human exposure to arsenic toxicity associated with the consumption of seafood.

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Section: Arsenolipids (Aslipids)mentioning

confidence: 99%

Organoarsenicals in Seafood: Occurrence, Dietary Exposure, Toxicity, and Risk Assessment Considerations – A Review

Luvonga

Rimmer

et al. 2020

J. Agric. Food Chem.

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show abstract

“…To zero out DC, we have to introduce negative transmissions into the pupil. An example of such pupil is SuperFLEX filter [5], which has been proposed with the purpose of increasing defocus latitude. This filter consist of a circle of radius σ with the transmission -1 (180º phase shift), and an outer annulus between radii σ and 1 with a clear transmission 1 (0º phase shift).…”

Section: L)mentioning

confidence: 99%

Extreme mask corrections: technology and benefits

Granik

Cobb

Медведев

2008

Optical Microlithography XXI

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We establish criteria to recognize extreme OPC corrections and discuss their difference from the traditional corrections. Then we present new proximity correction methods for rigorous bi-and tri-tone mask optimization that cast problem as a constraint minimization over the space of piecewise constant or continuous functions. The primary optimization objective is stated as a contour integral over the target. The constraints on image amplitude form convex functionals for dark areas and non-convex functionals for bright areas. A Lagrangian of this constrained problem is minimized. This delivers extreme, aggressive mask corrections, which are not confined by the fragmentation schema or the orientation of its sites. We analyze performance of these corrections under challenging process conditions and evaluate fidelity benefits.

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Contact Hole Printing in Binary Mask by FLEX Technique

Shun¹,

Sang²,

Manaf³

et al. 2006

2006 IEEE International Conference on Semiconductor Electronics

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The shrinking of contact opening is inevitable, as the technology progresses. The most obvious shrink strategies, wavelength reduction and phase-shifting masks (PSM) offer the most significant improvements to meet these demands, but at a hefty price. By using focus latitude exposure technique (FLEX) it is possible to print down contact hole with reasonable processing latitude using 248nm wavelength lithography and binary mask. A few parameters were varied to obtain suitable condition. Several feature sizes were printed and measured to get the proper combination of the print bias and focal distances with acceptable process margin. Verification on production wafer is needed for different pitch of feature sizes and fine-tuning on the focal distance for optimum results.

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Characterization of super-resolution photolithography

Cited by 3 publications

References 4 publications

Organoarsenicals in Seafood: Occurrence, Dietary Exposure, Toxicity, and Risk Assessment Considerations – A Review

Organoarsenicals in Seafood: Occurrence, Dietary Exposure, Toxicity, and Risk Assessment Considerations – A Review

Extreme mask corrections: technology and benefits

Contact Hole Printing in Binary Mask by FLEX Technique

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