Characterization of SION microring resonators for biosensing applications

Chalyan, Tatevik; Gandolfi, Davide; Guider, R.; Pavesi, L.; Pasquardini, Laura; Pederzolli, Cecilia; Samusenko, A.; Pucker, G.

doi:10.1109/biophotonics.2015.7304018

Cited by 4 publications

(4 citation statements)

References 6 publications

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“…After surface functionalization with DNA-aptamers we flowed a solution where in a DMSO buffer Aflatoxin M1 toxin was diluted. The lowest concentration of Aflatoxin M1 that we were able to detect was 1.58 nM [23].…”

Section: Jlt-18554-2015mentioning

confidence: 64%

“…On the optimum sample we performed surface sensing measurements [21,23]. After surface functionalization with DNA-aptamers we flowed a solution where in a DMSO buffer Aflatoxin M1 toxin was diluted.…”

Section: Jlt-18554-2015mentioning

confidence: 99%

“…Silicon oxynitride (SiON) has already been successfully employed as a CMOScompatible material for the development of biosensing devices, such as Mach-Zehnder interferometers [17,18], dualslab waveguide interferometers [19] and waveguides for absorption-based sensors [20]. Recently we validated the use of SiON as a platform for microring-based biosensing [21][22][23], applied to the problem of detection of aflatoxin in milk. In this paper we explain reliable simulation methods for design and optimization of such photonic sensor and present a detailed analysis of the influence of fabrication uncertainties on the device performance.…”

Section: Introductionmentioning

confidence: 99%

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A SiON Microring Resonator-Based Platform for Biosensing at 850 nm

Samusenko

Gandolfi²,

Pucker

et al. 2016

J. Lightwave Technol.

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In this paper we report on the design, fabrication and characterization of a photonic circuit for biosensing applications. Silicon oxynitride with a bulk refractive index of 1.66 is the core-layer material. The photonic circuit is optimized for a wavelength of ~850 nm, which allows on-chip integration of the light source via cost effective vertical-cavity surface-emitting lasers and of the detector by using standard silicon photodetectors. Design as well as fabrication processes are explained in details. The best characteristics for the single optical components in the photonic circuit are: for single-mode channel waveguides with dimensions of 350 nm × 950 nm; propagation losses of 0.8 dB/cm; bending losses of 0.1 dB/90 0 -bend (radius of curvature 100 µm); 49/51 splitting ratio for 3-dB power splitters (directional couplers); quality factors up to 1.3×10 5 for microring resonators. Volumetric sensing yields a bulk sensitivity of 80 nm/RIU and a limit of detection of 3×10 -6 RIU. Therefore, SiONbased photonic circuits represent a reliable material platform for biosensing in the short-wave near infrared region.

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Section: Jlt-18554-2015mentioning

confidence: 64%

Section: Jlt-18554-2015mentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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A SiON Microring Resonator-Based Platform for Biosensing at 850 nm

Samusenko

Gandolfi²,

Pucker

et al. 2016

J. Lightwave Technol.

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“…Sensors based on MRR performance in detecting glucose or other biochemical molecules can be identified through their sensitivity values. MRR-based sensitivity values are defined mathematically in Equation (3) [31]. S is the sensor sensitivity, ∆λ res is a resonance shift, and ∆n L is a change in the environmental refractive index.…”

Section: Simulation Approach For Predicting the Experimental Resultsmentioning

confidence: 99%

Enhanced Sensitivity of Microring Resonator-Based Sensors Using the Finite Difference Time Domain Method to Detect Glucose Levels for Diabetes Monitoring

et al. 2020

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The properties of light and its interaction with biological analytes have made it possible to design sophisticated and reliable optical-based biomedical sensors. In this paper, we report the simulation, design, and fabrication of microring resonator (MRR)-based sensors for the detection of diabetic glucose levels. Electron Beam Lithography (EBL) with 1:1 hydrogen silsesquioxane (HSQ) negative tone resist were used to fabricate MRR on a Silicon-on-Insulator (SOI) platform. Scanning Electron Microscopy (SEM) was then used to characterize the morphology of the MRR device. The full-width at half-maximum (FWHM) and quality factors of MRR were obtained by using a tunable laser source (TLS) and optical spectrum analyzer (OSA). In this paper, the three-dimensional Finite Difference Time Domain (3D FDTD) approach has been used to simulate the proposed design. The simulation results show an accurate approximation with the experimental results. Next, the sensitivity of MRR-based sensors to detect glucose levels is obtained. The sensitivity value for glucose level detection in the range 0% to 18% is 69.44 nm/RIU. This proved that our MRR design has a great potential as a sensor to detect diabetic glucose levels.

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