Characterization of postfabricated parylene C coatings inside PDMS microdevices

Flueckiger, Jonas; Bazargan, Vahid; Stoeber, Boris; Cheung, Karen C.

doi:10.1016/j.snb.2011.08.073

Cited by 43 publications

(24 citation statements)

References 51 publications

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“…For microfluidic technologies, the integration of PDMS and Parylene enabled devices with improved chemical inertness by using Parylene as a barrier coating to reduce the diffusion of analytes into the PDMS microchannel sidewalls. However, a uniform Parylene coating within a long PDMS microchannel is difficult because of Parylene's diffusion‐limited deposition process . One group improved this shortcoming by synthesizing Parylene caulked PDMS (pcPDMS), where the deposition rate of Parylene was slowed to allow for the Parylene monomers to diffuse into the bulk PDMS prior to the formation of the microchannel via bonding (Fig.…”

Section: Fabrication Techniquesmentioning

confidence: 99%

Micromachining of Parylene C for bioMEMS

Kim

Meng

2015

Polym. Adv. Technol.

164

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Recent advances in the micromachining of poly(p-xylylenes), commercially known as Parylenes, have enabled the development of novel structures and devices for microelectromechanical systems (MEMS). In particular, Parylene C (poly[chloro-p-xylylene]) has been explored extensively for biomedical applications of MEMS given its compatibility with micromachining processes, proven biocompatibility, and many advantageous properties including its chemical inertness, optical transparency, flexibility, and mechanical strength. Here we present a review of often used and recently developed micromachining process for Parylene C, as well as a high-level overview of state-of-the-art Parylene hybrid and free film devices for biomedical MEMS (bioMEMS) applications, including a discussion on its challenges and potential as a MEMS material.

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Section: Fabrication Techniquesmentioning

confidence: 99%

Micromachining of Parylene C for bioMEMS

Kim

Meng

2015

Polym. Adv. Technol.

164

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“…To determine whether broken-off PDMS was still inside the mold, we immersed the glass mold for 2 hours in an aqueous solution of Rhodamine B, which absorbs readily into PDMS [27]. Then, a fluorescence microscope was used to look for bright regions inside the glass, to locate any PDMS remaining in the mold.…”

Section: Determining Demolding Success Ratesmentioning

confidence: 99%

Molding topologically-complex 3D polymer microstructures from femtosecond laser machined glass

Schaap¹,

Bellouard²

2013

Opt. Mater. Express

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Abstract:The fabrication of complex, three-dimensional microscale shapes that can be replicated over large surfaces is an ongoing challenge, albeit one with a wide range of possible applications such as engineered surfaces with tuned wetting properties, scaffolds for cell studies, or surfaces with tailored optical properties. In this work, we use a two-step femtosecond laser directwrite technique and wet-etching process to fabricate monolithic glass micromolds with complex three-dimensional surface topologies, and demonstrate the replication of these structures in a soft polymer (polydimethylsiloxane, PDMS). To estimate the forces experienced during the demolding for one representative structure, we use a combination of two models -a simple linear elastic model and a numerical hyperelastic model. These models are used to support the high experimental success rates of the demolding process observed, despite the high strain induced in the material during demolding. Since the process used is scalable, this work opens new avenues for low-cost fabrication of surfaces having complex microscale patterns with three-dimensional geometries.

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“…The oxygen control may be significantly improved by setting the outside walls of the PDMS to be impermeable to oxygen; this should be possible by coating the outside of the PDMS block (e.g. with Parylene 29 ). The critical oxygen partial pressure (pO 2 ) value in solid tumor tissue is generally defined to range from 5-10 mm Hg 30 or 8-10 mm Hg 14 .…”

Section: Oxygen Gradient: Simulationmentioning

confidence: 99%

Microfluidic cell culture systems with integrated sensors for drug screening

Grist

Chrostowski

et al. 2012

SPIE Proceedings

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Cell-based testing is a key step in drug screening for cancer treatments. A microfluidic platform can permit more precise control of the cell culture microenvironment, such as gradients in soluble factors. These small-scale devices also permit tracking of low cell numbers. As a new screening paradigm, a microscale system for integrated cell culture and drug screening promises to provide a simple, scalable tool to apply standardized protocols used in cellular response assays. With the ability to dynamically control the microenvironment, we can create temporally varying drug profiles to mimic physiologically measured profiles. In addition, low levels of oxygen in cancerous tumors have been linked with drug resistance and decreased likelihood of successful treatment and patient survival. Our work also integrates a thin-film oxygen sensor with a microfluidic oxygen gradient generator which will in future allow us to create spatial oxygen gradients and study effects of hypoxia on cell response to drug treatment. In future, this technology promises to improve cell-based validation in the drug discovery process, decreasing the cost and increasing the speed in screening large numbers of compounds.

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Characterization of postfabricated parylene C coatings inside PDMS microdevices

Cited by 43 publications

References 51 publications

Micromachining of Parylene C for bioMEMS

Micromachining of Parylene C for bioMEMS

Molding topologically-complex 3D polymer microstructures from femtosecond laser machined glass

Microfluidic cell culture systems with integrated sensors for drug screening

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