Characterization of Polysilicon Microstructures to Estimate Local Temperature on CMOS Chips

Roy, Avisek; Marchetti, Luca; Azadmehr, Mehdi; Häfliger, Philipp; Ta, Bao Quoc; Aasmundtveit, Knut E.

doi:10.1109/estc48849.2020.9229851

2020 IEEE 8th Electronics System-Integration Technology Conference (ESTC) 2020

DOI: 10.1109/estc48849.2020.9229851

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Characterization of Polysilicon Microstructures to Estimate Local Temperature on CMOS Chips

Avisek Roy

Luca Marchetti

Mehdi Azadmehr

et al.

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Characterization of Polysilicon Microstructures to Estimate Local Temperature on CMOS Chips

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References 16 publications

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