Characterization of Piston-Tip-Tilt mirror pixels for scalable SLM arrays

Pardo, F.; Simon, M.E.; Aksyuk, Vladimir A.; Ryf, Roland; Lai, Wei; Pai, C. S.; Klemens, F.; Miner, J.F.; Cirelli, R.; Ferry, E.; Bower, J. E.; Mansfield, William; Kornblit, A.; Sorsch, T.; Taylor, J. Ashley; Baker, Matthew R.; Fullowan, R.; Dyson, Harold M.; Gasparyan, A.; Low, Y.L.; Ramsey, David J.; Arney, S.

doi:10.1109/omems.2006.1708245

Cited by 9 publications

(4 citation statements)

References 2 publications

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“…MMAs are utilized nowadays within deep-UV mask writers as reflective, programmable photomasks for the projection of flexible patterns and enable a highly parallel writing of mask structures [2]. Further application fields are currently expected within wafer steppers as a programmable mask [3]- [4] or potentially within the excimer laser illumination path, which indicates a still increasing interest in micro-optoelectro-mechanical-systems (MOEMS) for microlithography. Essential features of MMAs for mask writers are their high-speed operation, deep-UV capabilities, and the continuous deflection of micro-mirrors for a highly dynamic modulation of light.…”

Section: Introductionmentioning

confidence: 99%

Contrast properties of spatial light modulators for microlithography

et al. 2007

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The present article discusses steps for the realistic description of optical properties of micro-mirror arrays (MMA), which are utilized as programmable masks for microlithography. The article focuses on global contrast as an elementary example for the understanding of MMA's diffractive operation principle. Central point will be a discussion of those MEMS properties that influence the global MMA contrast, and how to introduce them into simulation. Surface corrugations of single mirrors and slit properties will be taken into account. Comparison is made with experimental contrast data to validate the theoretical assumptions

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Section: Introductionmentioning

confidence: 99%

Contrast properties of spatial light modulators for microlithography

et al. 2007

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“…In essence a diffraction grating was formed by the pixels themselves. Image formation using electro-statically controlled piston-only mirrors and similar optical techniques to control the phase of the reflected light have been explored before [25][26][27][28]. There are several methods to form the interference array, and these will be discussed shortly.…”

Section: Visible Light Readout Schemementioning

confidence: 99%

“…If this were indeed possible, it would also eliminate the extensive, and therefore costly, calibration procedures necessary for other technologies such as bolometers. The purpose of this paper is to report on our progress in coupling our expertise in spatial light modulator design [25][26][27][28][29] with thermally actuated MEMS cantilevers to work towards a direct-view readout technology.…”

Section: Introductionmentioning

confidence: 99%

MEMS thermal imager with optical readout

Jones¹,

Bolle²,

Ryf³

et al. 2009

Sensors and Actuators A: Physical

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“…Given our expertise in silicon-based MEMS technology, and in particular on spatial light modulators [1,2,17,22], we focused our fabrication efforts in the first area. In this paper, we will specifically describe our efforts to create prototypes of a "direct-view" sensor based on MEMS cantilever technology.…”

Section: Background: Longwave Ir Technologiesmentioning

confidence: 99%

Opportunities in uncooled infrared imaging: A MEMS perspective

Jones¹,

Bolle²,

Ryf³

et al. 2009

Bell Labs Tech. J.

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The applications for IR imaging have traditionally been aggressively pursued by military and homeland security organizations and have trickled down to other organizations such as search and rescue, firefighting, and law enforcement. As technologies become cheaper, a wider consumer market starts to open up including consumer security (e.g., parking lot security), sporting goods, home security, home heating/inspection markets, and automotive safety systems. For example, LWIR imaging systems have recently been offered on high-end BMW automobiles; however, the high cost of these systems still makes them a luxury option for car buyers and not profitable for the car companies.The military continues to explore imaging systems where performance criteria are the most important factors: pixel count, sensitivity, and response time. Lower cost technologies are necessary to pursue consumer applications and would also be useful in the military arena for more widespread deployment

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Characterization of Piston-Tip-Tilt mirror pixels for scalable SLM arrays

Cited by 9 publications

References 2 publications

Contrast properties of spatial light modulators for microlithography

Contrast properties of spatial light modulators for microlithography

MEMS thermal imager with optical readout

Opportunities in uncooled infrared imaging: A MEMS perspective

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