2005
DOI: 10.1016/j.apsusc.2005.02.122
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Characterization of microroughness parameters in gadolinium oxide thin films: A study based on extended power spectral density analyses

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Cited by 105 publications
(88 citation statements)
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“…''K correlation'' or ''ABC Model'' [30][31][32][33] Structure present at a larger dimensional scale, such as grain size in the present case, may be superimposed on small-scale structure. Such structure has been described in cluster ion beam polishing and in thin film growth [22]. The PSD of such a model is described by…”
Section: Fractal Structure Modelmentioning
confidence: 99%
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“…''K correlation'' or ''ABC Model'' [30][31][32][33] Structure present at a larger dimensional scale, such as grain size in the present case, may be superimposed on small-scale structure. Such structure has been described in cluster ion beam polishing and in thin film growth [22]. The PSD of such a model is described by…”
Section: Fractal Structure Modelmentioning
confidence: 99%
“…Researchers [22,26,27] in the optics and microelectronics communities applying PSD analysis have noticed characteristic patterns associated with frequently occurring topographies. For example, a 90 sharp step gives a PSD having the form K=f 2 , a straight line of slope À2 in log-log coordinates.…”
Section: Components Analysismentioning
confidence: 99%
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“…65 Here we have adopted the definition used previously for the 2-D PSD of a surface described by its topography z (x; y). 65,66 As before, 63 the AFM scan data were detrended by removing a least squares two dimensional first order polynomial from each record before further analysis. In this study, the PSD profiles that were measured at different locations under the same scan condition were averaged separately.…”
Section: Surface Roughness Measurementmentioning
confidence: 99%