Characterization of laser beams: theory and application in laser-assisted bonding process

Abstract

The International Organization for Standardization (ISO), in collaboration with the academic community, has developed and published a comprehensive system of standards for the characterization of optical components and laser beams. Our study offers a pedagogical introduction to the theory and application of laser beam characterization in accordance with ISO 13694:2018 and ISO 11145:2018. The characterizing parameters of each ISO standard are presented, defined mathematically, and explained in detail through the use of a minimum working example. A laser beam applied to an actual industrial process [laser-assisted bonding (LAB) process in the semiconductor packaging industry] is thoroughly analyzed to help the reader understand and interpret the characterizing results. Background noise correction and unit conversion methods are also discussed. We target researchers new to the field of laser beam analysis who want the acquire background knowledge, as well as more experienced researchers who want to implement their own laser beam analysis software and propose new definitions for their specific application. Although our study deals with only two ISO standards, the methods covered in our study can be easily applied to other norms that fit the reader's application. Our study should not be treated as a full review of the LAB process nor of the beam profiling instruments and measurement principles. These are only mentioned to enhance the reader's learning experience.